XYZ Scanners

For Positioning and Scanning on 3 Axes

XYZ Scanners are all-rounders in positioning technology. Applications include sample adjustment, handling in microsystem technology, sample manipulation, fiber positioning and photonics.

PI P-616 NanoCube®
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P-616 NanoCube® Nanopositioner

Compact Parallel-Kinematic Piezo System for Nanopositioning and Fiber Alignment

  • Parallel-kinematic design for the highest stiffness in all spatial directions
  • Highly dynamic motion due to high resonant frequencies even with loads up to 50 g
  • Innovative product design for flexible use due to single mounting platform.
  • Only nanopositioner available on the market with ID chip functionality
  • Smallest and lightest NanoCube® with 100 µm travel range on the market
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P-545.3D8S PInano® Trak Piezo Tracking System

Fast XY(Z) stage for high dynamics microscopy

  • Fast response <5 ms with subnanometer resolution: Ideal for tracking
  • Travel ranges to 70 µm × 70 µm × 50 µm
  • Low profile for easy integration: 20 mm
  • Recessed sample holders, freely revolving nosepiece
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P-545.xC8S PInano® Cap XY(Z) Piezo System

Capacitive positioning measurement for superresolution microscopy

  • Highest stability and repeatability
  • Travel ranges to 200 µm × 200 µm × 200 µm
  • Subnanometer resolution
  • Fast response in the ms range
  • Low profile for easy integration: 20 mm
  • Recessed sample holders, freely revolving nosepiece
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P-545.xR8S PInano® XY(Z) Piezo System

Low-cost nanopositioning system for superresolution microscopy

  • Cost-effective design due to piezoresistive sensors
  • Travel ranges to 200 µm × 200 µm × 200 µm
  • Low profile for easy integration: 20 mm
  • Clear aperture for 3×1'' microscope slide, recessed sample holders
  • Outstanding lifetime due to PICMA® piezo actuators
  • Subnanometer resolution, fast response in the ms range
PI P-611.3S
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P-611.3 NanoCube® XYZ Piezo Stage

Compact Multi-Axis Piezo System for Nanopositioning and Fiber Alignment

  • Travel range to 120 µm × 120 µm × 120 µm
  • Ultra-compact: 44 mm × 44 mm × 44 mm
  • Resolution to 0.2 nm
  • Rapid response
  • Frictionless, high-precision flexure guiding system
  • Outstanding lifetime due to PICMA® piezo actuators
  • For fast scanning
  • Version with integrated fiber adapter interface
  • Especially cost-effective systems
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P-733.2 • P-733.3 XY(Z) Piezo Nanopositioning Stage

High-Precision XY(Z) Scanner Family with Aperture

  • Travel ranges to 100 µm × 100 µm in X,Y and to 10 µm in Z
  • Resolution to 0.1 nm with capacitive sensors
  • High-speed versions with direct drive
  • Vacuum-compatible and non-magnetic versions
  • Parallel kinematics for enhanced dynamics and better multi-axis accuracy
  • Parallel metrology for active trajectory control
  • Frictionless, high-precision flexure guiding system
  • Clear aperture 50 mm × 50 mm for transmitted-light applications
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P-561 • P-562 • P-563 PIMars Nanopositioning Stage

High-Precision Nanopositioning System for up to 6 Axes

  • Parallel kinematics / metrology for enhanced responsiveness and multi-axis precision
  • Travel ranges to 300 x 300 x 300 µm
  • Highest linearity and stability with capacitive sensors
  • Frictionless, high-precision flexure guiding system
  • Excellent scanning flatness
  • High-dynamics XYZ version available; custom versions to 6 degrees of freedom
  • Clear aperture 66 mm x 66 mm
  • Outstanding lifetime due to PICMA® piezo actuators
  • UHV versions to 10-9 hPa
PI P-517.3CL
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P-517 • P-527 Multi-Axis Piezo Scanner

High-Dynamics Nanoscanner for Scanning Probe Microscopy

  • 2- and 3-axis versions (XY and XYθZ)
  • Travel ranges to 200 µm
  • Subnanometer resolution
PI P-363
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P-363 PicoCube XY(Z) Piezo Scanner

High-Dynamics Nanoscanner for Scanning Probe Microscopy

  • Ultra-high-performance closed-loop scanner for AFM / SPM
  • Compact manipulation tool for bio- / nanotechnology
  • Resonant frequency 9.8 kHz
  • Capacitive sensors for highest accuracy
  • Parallel-motion metrology for automated compensation of guiding errors
  • Resolution 50 picometer
  • Travel range 5 µm × 5 µm × 5 µm
  • Vacuum-compatible versions
PI P-313
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P-313 PicoCube XY(Z) Piezo Scanner

Picometer Precision, High Bandwidth, No Servo Lag, for Scanning Probe Microscopy

  • Ultra-high-performance closed-loop scanner for AFM / SPM
  • 20 picometers resolution, <1 nm hysteresis
  • New drive concept for very high bandwidth, no servo lag
  • Compact manipulation tool for bio- / nanotechnology
  • Resonant frequency 4 kHz (X, Y), 11 kHz (Z)
  • Travel range 1 µm × 1 µm × 0.8 µm
PI P-915KPPS
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P-915KPPS XY-Theta-Z Piezo Stage

3 Degrees of Freedom in the XY Plane

  • Travel ranges 250 µm × 250 µm, 16 mrad
  • Frictionless, high-precision flexure guiding system
  • High stiffness over 1 N/µm
  • Outstanding lifetime due to PICMA® piezo actuators
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P-915KLVS Vacuum Compatible XYZ Piezo Scanner

Large Clear Aperture, High-Dynamics, High-Load Nanopositioner

  • Vacuum-compatible to 10-6 hPa
  • Direct metrology with capacitive sensors
  • Excellent straightness: <0.1 µrad runout
  • Frictionless, high-precision flexure guiding system