P-517 • P-527 Multi-Axis Piezo Scanner

High-Dynamics Nanoscanner for Scanning Probe Microscopy

PI P-517.3CL
2- and 3-axis versions (XY and XYθZ)
Travel ranges to 200 µm
Subnanometer resolution


P-517.2CL
P-517.2CD

P-527.2CL
P-527.2CD

P-517.3CL
P-517.3CD

P-527.3CL
P-527.3CD

P-517.RCD

P-527.RCD

Unit

Tolerance

Active axes

X, Y

X, Y

X, Y, Z

X, Y, Z

X, Y, θZ X, Y, θZ


Motion and positioning

Integrated sensor

Capacitive

Capacitive

Capacitive

Capacitive

Capacitive

Capacitive

Open-loop travel, -20 to 120 V

130 µm

250 µm

X, Y: 130 µmZ: 25 µm

X, Y: 250 µmZ: 25 µm

X, Y: 130 µmθZ: ±1.3 mrad X, Y: 250 µmθZ: ±2.5 mrad

min. (20 %/-0 %)

Closed-loop travel

100 µm

200 µm

X, Y: 100 µmZ: 20

X, Y: 200 µmZ: 20

X, Y: 100 µmθZ: ±1 mrad X, Y: 200 µmθZ: ±2 mrad

Open-loop resolution

0.3 nm

0.5 nm

X, Y: 0.3 nmZ: 0.1 nm

X, Y: 0.5 nmZ: 0.1 nm

X, Y: 0.3 nmθZ: 0.1 µrad X, Y: 0.5 nmθZ: 0.1 µrad

typ.

Closed-loop resolution

1 nm

2 nm

X, Y: 1 nmZ: 0.1 nm

X, Y: 2 nmZ: 0.1 nm

X, Y: 1 nmθZ: 0.3 µrad X, Y: 2 nmθZ: 0.3 µrad

typ.

Linearity error

0.03

0.03

0.03

0.03

0.03

0.03

%

typ.

Repeatability

±5 nm

±10 nm

X, Y: ±5 nmZ: ±1 nm

X, Y: ±10 nmZ: ±1 nm

X, Y: ±5 nmθZ: ±0.5 µrad X, Y:±10 nmθZ: ±1 µrad

typ.


Mechanical properties

Stiffness

2

1

X, Y: 2Z: 15

X, Y: 1Z: 15

2

1

N/µm

±20 %

Resonant frequency, no load

450

350

X, Y: 450Z: 1100

X, Y: 350Z: 1100

X, Y: 450θZ: 400 X, Y: 350θZ: 300

Hz

±20 %

Resonant frequency in X, Y, at 500 g

250

190

250

190

250

190

Hz

±20 %

Resonant frequency in X, Y, at 2500 g

140

110

140

110

140

110

Hz

±20 %

Push / pull force capacity in motion direction

50 / 30

50 / 30

50 / 30

50 / 30

50 / 30

50 / 30

N

max.


Drive properties

Piezo ceramic

PICMA® P-885

PICMA® P-885

PICMA® P-885

PICMA® P-885

PICMA® P-885

PICMA® P-885

Electrical capacitance

9.2

9.2

X, Y: 9Z: 6

X, Y: 9Z: 6

9

9

µF

±20 %

Dynamic Operating Current Coefficient*

11.5

5.8

X, Y: 11.5Z: 37

X, Y: 5.5Z: 37

11.5

5.5

µA / (Hz × µm)

±20 %


Miscellaneous

Operating temperature range

-20 to 80

-20 to 80

-20 to 80

-20 to 80

-20 to 80

-20 to 80

°C

Material

Aluminum

Aluminum

Aluminum

Aluminum

Aluminum

Aluminum

Mass

1.4

1.4

1.45

1.45

1.4

1.4

kg

±5 %

Sensor / voltage connection

CL version: LEMO

CD version: Sub-D Special

CL version: LEMO

CD version: Sub-D Special

CL version: LEMO

CD version: Sub-D Special

CL version: LEMO

CD version: Sub-D Special

Sub-D Special

Sub-D Special

The resolution of PI piezo nanopositioning systems is not limited by friction or stiction. Value given is noise-equivalent motion with the E-503 piezo amplifier module or E-710 digital piezo controller.

* Dynamic Operating Current Coefficient (DOCC) of the linear axes in µA per hertz and µm. Electrical capacitance and DOCC of the rotational axes are based on differential X and Y motion, therefore not stated. Example: P-527.2xx: Sinusoidal operation with 30 µm at 10 Hz requires approximately 1.8 mA current.

Recommended controllers for CL versions:

Single-channel (1 per axis): E-610 servo-controller / amplifier, E-625 servo-controller, bench-top, E-621 controller module

Multi-channel: E-500 modular piezo controller system with E-503 amplifier module (three channels) or E-505 (1 per axis, high-power) and E-509 controller

Recommended controllers for CD versions:

Multi-channel digital controllers: E-710 / E-725 bench-top, E-712 modular, E-725 high-power, E-761 PCI board

Ask about custom designs!

Drawings / Images

PI P-571 Drawing
P-517.2CL
Precision XY Nanopositioning System, 100 µm × 100 µm, Capacitive Sensors, Parallel Metrology, LEMO Connector(s)
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P-517.2CD
Precision XY Nanopositioning System, 100 µm × 100 µm, Capacitive Sensors, Parallel Metrology, Sub-D Connector(s)
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P-527.2CL
Precision XY Nanopositioning System, 200 µm × 200 µm, Capacitive Sensors, Parallel Metrology, LEMO Connector(s)
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P-527.2CD
Precision XY Nanopositioning System, 200 µm × 200 µm, Capacitive Sensors, Parallel Metrology, Sub-D Connector(s)
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P-517.3CL
Precision XYZ Nanopositioning System, 100 µm × 100 µm × 20 µm, Capacitive Sensors, Parallel Metrology, LEMO Connector(s)
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P-517.3CD
Precision XYZ Nanopositioning System, 100 µm × 100 µm × 20 µm, Capacitive Sensors, Parallel Metrology, Sub-D Connector(s)
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P-527.3CD
Precision XYZ Nanopositioning System, 200 µm × 200 µm × 20 µm, Capacitive Sensors, Parallel Metrology, Sub-D Connector(s)
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P-517.RCD
Precision XY / Rotation Nanopositioning System, 100 µm × 100 µm, 2 mrad, Capacitive Sensors, Parallel Metrology, Sub-D Connector(s)
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P-527.RCD
Precision XY / Rotation Nanopositioning System, 200 µm × 200 µm, 4 mrad, Capacitive Sensors, Parallel Metrology, Sub-D Connector(s)
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Downloads

Datasheet

pdf
pdf

PI Datasheet P-517 • P-527

Multi-Axis Piezo Scanner High-Dynamics Nanoscanner for Scanning Probe Microscopy
pdf - 760 KB
pdf - 754 KB

Documentation

pdf

Short Instructions PZ240EKDK

P-5xx, P-6xx, P-7xx Piezo Positionings Systems
3.0.0
All
pdf - 984 KB
pdf
pdf

User Manual PZ82

P-517, P-518, P-527, P-528, P-558 Piezo Nanopositioning Systems with Capacitive Sensors
3.0.0
pdf - 939 KB
pdf - 938 KB

3D Models

zip

P-5x7 STEP

English
zip - 221 KB