P-517 • P-527 Multi-Axis Piezo Scanner

High-Dynamics Nanoscanner for Scanning Probe Microscopy

PI P-517.3CL
2- and 3-axis versions (XY and XYθZ)
Travel ranges to 200 µm
Subnanometer resolution

Specifications

pdf
pdf

PI Datasheet P-517 • P-527

Multi-Axis Piezo Scanner High-Dynamics Nanoscanner for Scanning Probe Microscopy
pdf - 760 KB
pdf - 754 KB

Drawings / Images

PI P-571 Drawing
P-517.2CL
Precision XY Nanopositioning System, 100 µm × 100 µm, Capacitive Sensors, Parallel Metrology, LEMO Connector(s)
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P-517.2CD
Precision XY Nanopositioning System, 100 µm × 100 µm, Capacitive Sensors, Parallel Metrology, Sub-D Connector(s)
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P-527.2CL
Precision XY Nanopositioning System, 200 µm × 200 µm, Capacitive Sensors, Parallel Metrology, LEMO Connector(s)
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P-527.2CD
Precision XY Nanopositioning System, 200 µm × 200 µm, Capacitive Sensors, Parallel Metrology, Sub-D Connector(s)
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P-517.3CL
Precision XYZ Nanopositioning System, 100 µm × 100 µm × 20 µm, Capacitive Sensors, Parallel Metrology, LEMO Connector(s)
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P-517.3CD
Precision XYZ Nanopositioning System, 100 µm × 100 µm × 20 µm, Capacitive Sensors, Parallel Metrology, Sub-D Connector(s)
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P-527.3CD
Precision XYZ Nanopositioning System, 200 µm × 200 µm × 20 µm, Capacitive Sensors, Parallel Metrology, Sub-D Connector(s)
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P-517.RCD
Precision XY / Rotation Nanopositioning System, 100 µm × 100 µm, 2 mrad, Capacitive Sensors, Parallel Metrology, Sub-D Connector(s)
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P-527.RCD
Precision XY / Rotation Nanopositioning System, 200 µm × 200 µm, 4 mrad, Capacitive Sensors, Parallel Metrology, Sub-D Connector(s)
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Ask about custom designs!

Downloads

Datasheet

pdf
pdf

PI Datasheet P-517 • P-527

Multi-Axis Piezo Scanner High-Dynamics Nanoscanner for Scanning Probe Microscopy
pdf - 760 KB
pdf - 754 KB

Documentation

pdf

Short Instructions PZ240EKDK

P-5xx, P-6xx, P-7xx Piezo Positionings Systems
4.0.0 2017-02-06
pdf - 635 KB
pdf
pdf

User Manual PZ82

P-517, P-518, P-527, P-528, P-558 Piezo Nanopositioning Systems with Capacitive Sensors
3.0.0
3.0.0
pdf - 939 KB
pdf - 938 KB

3D Models

zip

P-5x7 STEP

English
zip - 221 KB