P-517 • P-527 Multi-Axis Piezo Scanner

High dynamics Nanopositioner / Scanner with Direct Position Measuring

2- and 3-axis versions (XY and XYθZ)
Travel ranges to 200 µm
Subnanometer resolution

Fields of application

  • Metrology
  • Interferometry
  • Photonics / integrated optics
  • Lithography
  • Nanopositioning
  • Scanning microscopy
  • Sample alignment
  • Micromachining

 

Specifications

Datasheet P-517 • P-527

Version / Date
2018-02-19
Version / Date
2018-02-19
Document language
pdf - 831 KB
pdf - 835 KB

Drawings / Images

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Downloads

Datasheet

Datasheet P-517 • P-527

Version / Date
2018-02-19
Version / Date
2018-02-19
Document language
pdf - 831 KB
pdf - 835 KB

Documentation

Short Instructions PZ240EKDK

P-5xx, P-6xx, P-7xx Piezo Positionings Systems
Version / Date
4.0.0 2017-02-06
pdf - 635 KB

User Manual PZ82

P-517, P-518, P-527, P-528, P-558 Piezo Nanopositioning Systems with Capacitive Sensors
Version / Date
2013-09-05
Version / Date
2013-09-05
Document language
pdf - 939 KB
pdf - 938 KB

3-D Models

P-5x7 STEP

zip - 221 KB