P-561 • P-562 • P-563 PIMars Nanopositioning Stage

High-Precision Nanopositioning System for up to 3 Axes

Parallel kinematics / metrology for enhanced responsiveness and multi-axis precision
Travel ranges to 300 x 300 x 300 µm
Highest linearity and stability with capacitive sensors
Frictionless, high-precision flexure guiding system
Excellent scanning flatness
High-dynamics XYZ version available
Clear aperture 66 mm x 66 mm
Outstanding lifetime due to PICMA® piezo actuators
UHV versions to 10-9 hPa

Specifications

pdf
pdf

Datasheet P-561 • P-562 • P-563

2017-05-08
2017-05-08
pdf - 1,014 KB
pdf - 1,017 KB

Drawings / Images

PI P-562.6CD Drawing
P-561.3DD Drawing
P-562.3CD (unloaded) step and settle is faster than 10 ms in X, Y and Z
P-561.3CD
PIMars XYZ Nanopositioning System with Large Travel Range, 100 µm × 100 µm × 100 µm, Capacitive Sensors, Parallel Metrology, Sub-D Connector(s)
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P-561.3CL
PIMars XYZ Nanopositioning System with Large Travel Range, 100 µm × 100 µm × 100 µm, Capacitive Sensors, Parallel Metrology, LEMO Connector(s)
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P-561.3DD
PIMars High-Dynamics XYZ Nanopositioning System, 45 µm × 45 µm × 15 µm, Capacitive Sensors, Parallel Metrology, Sub-D Connector(s), Direct Drive
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P-562.3CD
PIMars XYZ Nanopositioning System with Large Travel Range, 200 µm × 200 µm × 200 µm, Capacitive Sensors, Parallel Metrology, Sub-D Connector(s)
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P-562.3CL
PIMars XYZ Nanopositioning System with Large Travel Range, 200 µm × 200 µm × 200 µm, Capacitive Sensors, Parallel Metrology, LEMO Connector(s)
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P-563.3CD
PIMars XYZ Nanopositioning System with Large Travel Range, 300 µm × 300 µm × 300 µm, Capacitive Sensors, Parallel Metrology, Sub-D Connector(s)
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In cart Remove from cart
P-563.3CL
PIMars XYZ Nanopositioning System with Large Travel Range, 300 µm × 300 µm × 300 µm, Capacitive Sensors, Parallel Metrology, LEMO Connector(s)
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Ask about custom designs!

Downloads

Datasheet

pdf
pdf

Datasheet P-561 • P-562 • P-563

2017-05-08
2017-05-08
pdf - 1,014 KB
pdf - 1,017 KB

Documentation

pdf

Short Instructions PZ240EKDK

P-5xx, P-6xx, P-7xx Piezo Positionings Systems
4.0.0 2017-02-06
pdf - 635 KB
pdf
pdf

User Manual PZ248

P-561, P-562, P-563 PIMars XYZ Nanopositioning Systems
2013-11-22
2013-11-22
pdf - 947 KB
pdf - 972 KB

3-D Models

zip

P-56x STEP

English
zip - 3 MB