P-561 • P-562 • P-563 PIMars Nanopositioning Stage

High-Precision Nanopositioning System for up to 6 Axes

Parallel kinematics / metrology for enhanced responsiveness and multi-axis precision
Travel ranges to 300 x 300 x 300 µm
Highest linearity and stability with capacitive sensors
Frictionless, high-precision flexure guiding system
Excellent scanning flatness
High-dynamics XYZ version available; custom versions to 6 degrees of freedom
Clear aperture 66 mm x 66 mm
Outstanding lifetime due to PICMA® piezo actuators
UHV versions to 10-9 hPa

Specifications

pdf
pdf

PI Datasheet P-561 • P-562 • P-563

PIMars Nanopositioning Stage High-Precision Nanopositioning System for up to 6 Axes
pdf - 814 KB
pdf - 810 KB

Drawings / Images

P-562.3CD (unloaded) step and settle is faster than 10 ms in X, Y and Z
P-561.3CD
PIMars XYZ Nanopositioning System with Large Travel Range, 100 µm × 100 µm × 100 µm, Capacitive Sensors, Parallel Metrology, Sub-D Connector(s)
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P-561.3CL
PIMars XYZ Nanopositioning System with Large Travel Range, 100 µm × 100 µm × 100 µm, Capacitive Sensors, Parallel Metrology, LEMO Connector(s)
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P-561.3DD
PIMars High-Dynamics XYZ Nanopositioning System, 45 µm × 45 µm × 15 µm, Capacitive Sensors, Parallel Metrology, Sub-D Connector(s), Direct Drive
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P-562.3CD
PIMars XYZ Nanopositioning System with Large Travel Range, 200 µm × 200 µm × 200 µm, Capacitive Sensors, Parallel Metrology, Sub-D Connector(s)
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P-562.3CL
PIMars XYZ Nanopositioning System with Large Travel Range, 200 µm × 200 µm × 200 µm, Capacitive Sensors, Parallel Metrology, LEMO Connector(s)
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P-563.3CD
PIMars XYZ Nanopositioning System with Large Travel Range, 300 µm × 300 µm × 300 µm, Capacitive Sensors, Parallel Metrology, Sub-D Connector(s)
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In cart Remove from cart
P-563.3CL
PIMars XYZ Nanopositioning System with Large Travel Range, 300 µm × 300 µm × 300 µm, Capacitive Sensors, Parallel Metrology, LEMO Connector(s)
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Ask about custom designs!

Downloads

Datasheet

pdf
pdf

PI Datasheet P-561 • P-562 • P-563

PIMars Nanopositioning Stage High-Precision Nanopositioning System for up to 6 Axes
pdf - 814 KB
pdf - 810 KB

Documentation

pdf

Short Instructions PZ240EKDK

P-5xx, P-6xx, P-7xx Piezo Positionings Systems
3.0.0
pdf - 603 KB
pdf
pdf

User Manual PZ248

P-561, P-562, P-563 PIMars XYZ Nanopositioning Systems
pdf - 947 KB
pdf - 972 KB

3D Models

zip

P-56x STEP

English
zip - 3 MB