P-611.3 NanoCube® XYZ Piezo Stage

Compact Multi-Axis Piezo System for Nanopositioning and Fiber Alignment

PI P-611.3S
Travel range to 120 µm × 120 µm × 120 µm
Ultra-compact: 44 mm × 44 mm × 44 mm
Resolution to 0.2 nm
Rapid response
Frictionless, high-precision flexure guiding system
Outstanding lifetime due to PICMA® piezo actuators
For fast scanning
Version with integrated fiber adapter interface
Especially cost-effective systems


P-611.3S
P-611.3SF

P-611.3O
P-611.3OF

Unit

Tolerance

Active axes

X, Y, Z

X, Y, Z

Motion and positioning

Integrated sensor

SGS

Open-loop travel, -20 to 120 V

120 / axis

120 / axis

µm

min. (20 % /-0%)

Closed-loop travel

100 / axis

µm

Open-loop resolution

0.2

0.2

nm

typ.

Closed-loop resolution

1

nm

typ.

Linearity error

0.1

%

typ.

Repeatability

<10

nm

typ.

Pitch in X, Y

±5

±5

µrad

typ.

Runout θX (motion in Z)

±10

±10

µrad

typ.

Yaw in X

±20

±20

µrad

typ.

Yaw in Y

±10

±10

µrad

typ.

Runout θY (motion in Z)

±10

±10

µrad

typ.


Mechanical properties

Stiffness

0.3

0.3

N/µm

±20 %

Unloaded resonant frequency X / Y / Z

350 / 220 / 250

350 / 220 / 250

Hz

±20 %

Resonant frequency at 30 g in X / Y / Z

270 / 185 / 230

270 / 185 / 230

Hz

±20 %

Resonant frequency at 100 g in X / Y / Z

180 / 135 / 200

180 / 135 / 200

Hz

±20 %

Push / pull force capacity in motion direction

15 / -10

15 / -10

N

max.

Load capacity

15

15

N

max.


Drive properties

Ceramic type

PICMA® P-885

PICMA® P-885

Electrical capacitance

1.5

1.5

µF

±20 %

Dynamic operating current coefficient

1.9

1.9

µA/(Hz × µm)

±20 %


Miscellaneous

Operating temperature range

-20 to 80

-20 to 80

°C

Material

Aluminum, steel

Aluminum, steel

Dimensions

48 mm × 44 mm × 43.2 mmSF version: 44 mm × 50 mm × 44.2 mm

44 mm × 44 mm × 43.2 mmOF version: 44 mm × 50 mm × 44.2 mm

Mass

0.32

0.32

kg

±5 %

Cable length

1.5

1.5

m

±10 mm

Sensor connection

Sub-D connector

Voltage connection

Sub-D connector

Sub-D connector

Recommended controller / amplifier

E-664 NanoCube® Controller

3 × E-610.00F OEM amplifier modules;E-663 3-channel amplifier, bench-top

The resolution of PI piezo nanopositioners is not limited by friction or stiction. Value is given noise equivalent motion with E-503 amplifier

Dynamic Operating Current Coefficient in µA per Hz and µm. Example: Sinusoidal scan of 50 µm at 10 Hz requires approximately 0.9 mA drive current.

Adapter cable with LEMO connectors for sensor and operating voltage available.

Ask about custom designs!

Drawings / Images

PI P-611.3 Drawing

Downloads

Datasheet

pdf
pdf

PI Datasheet P-611.3

NanoCube® XYZ Piezo Stage Compact Multi-Axis Piezo System for Nanopositioning and Fiber Alignment
pdf - 737 KB
pdf - 734 KB

Documentation

pdf
pdf

User Manual PZ253

P-611 Nanopositioning Systems with Strain Gauge Sensors / without Sensor
1.0.0
pdf - 1 MB
pdf - 1 MB
pdf

Technical Note P611T0006

Unpacking and Handling of P-611 Nanopositioning Systems
2014-07-29
English
pdf - 162 KB

3D Models

zip

P-611.3x STEP

English
zip - 187 KB