P-915KPPS XY-Theta-Z Piezo Stage

3 Degrees of Freedom in the XY Plane

PI P-915KPPS
Travel ranges 250 µm × 250 µm, 16 mrad
Frictionless, high-precision flexure guiding system
High stiffness over 1 N/µm
Outstanding lifetime due to PICMA® piezo actuators


Travel

Resolution

Load capacity

Settling time (system combination with E-621)

Dimensions

P-915KPPSXY-Theta-Z Stage

250 µm × 250 µm

± 8 mrad

3 nm

15 µrad

2 kg

45 ms (250 µm)

28 ms (16 mrad)

60 mm × 60 mm × 100 mm

Downloads

Datasheet

pdf
pdf

PI Datasheet P-915KPPS

XY-Theta-Z Piezo Stage 3 Degrees of Freedom in the XY Plane
pdf - 645 KB
pdf - 645 KB