P-915KPPS XY-Theta-Z Piezo Stage

3 Degrees of Freedom in the XY Plane

PI P-915KPPS
Travel ranges 250 µm × 250 µm, 16 mrad
Frictionless, high-precision flexure guiding system
High stiffness over 1 N/µm
Outstanding lifetime due to PICMA® piezo actuators

Specifications

pdf
pdf

PI Datasheet P-915KPPS

XY-Theta-Z Piezo Stage 3 Degrees of Freedom in the XY Plane
pdf - 645 KB
pdf - 645 KB

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Datasheet

pdf
pdf

PI Datasheet P-915KPPS

XY-Theta-Z Piezo Stage 3 Degrees of Freedom in the XY Plane
pdf - 645 KB
pdf - 645 KB