P-518 • P-528 • P-558 Piezo Z / Tip / Tilt Stage

High-Dynamics with Large Clear Aperture

PI P-518.ZCD
1- and 3-axis versions
Closed-loop vertical / tilt range to 200 µm / 2 mrad (open-loop to 240 µm / 2.4 mrad)
Enhanced responsiveness & multi-axis precision: Parallel kinematics / metrology
Frictionless, high-precision flexure guiding system
Outstanding lifetime due to PICMA® piezo actuators
Clear aperture 66 mm × 66 mm
Highest linearity and stability with capacitive sensors

Specifications

pdf
pdf

PI Datasheet P-518 • P-528 • P-558

Piezo Z / Tip / Tilt Stage High-Dynamics with Large Clear Aperture
pdf - 768 KB
pdf - 755 KB

Drawings / Images

Ordering Information

P-558.ZCD
Precision Nanopositioning Z Stage, 50 µm, Direct Metrology, Capacitive Sensors, Sub-D Connector(s)
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P-558.ZCL
Precision Nanopositioning Z Stage, 50 µm, Direct Metrology, Capacitive Sensors, LEMO Connector(s)
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P-518.ZCD
Precision Nanopositioning Z Stage, 100 µm, Direct Metrology, Capacitive Sensors, Sub-D Connector(s)
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P-518.ZCL
Precision Nanopositioning Z Stage, 100 µm, Direct Metrology, Capacitive Sensors, LEMO Connector(s)
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P-528.ZCD
Precision Nanopositioning Z Stage, 200 µm, Direct Metrology, Capacitive Sensors, Sub-D Connector(s)
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P-528.ZCL
Precision Nanopositioning Z Stage, 200 µm, Direct Metrology, Capacitive Sensors, LEMO Connector(s)
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P-558.TCD
Precision Nanopositioning Z/Tip/Tilt Stage, 50 µm, 0.6 mrad, Parallel Metrology, Capacitive Sensors, Sub-D Connector(s)
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P-518.TCD
Precision Nanopositioning Z/Tip/Tilt Stage, 100 µm, 1.4 mrad, Parallel Metrology, Capacitive Sensors, Sub-D Connector(s)
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P-528.TCD
Precision Nanopositioning Z/Tip/Tilt Stage, 200 µm, 2.4 mrad, Parallel Metrology, Capacitive Sensors, Sub-D Connector(s)
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Downloads

Datasheet

pdf
pdf

PI Datasheet P-518 • P-528 • P-558

Piezo Z / Tip / Tilt Stage High-Dynamics with Large Clear Aperture
pdf - 768 KB
pdf - 755 KB

Documentation

pdf
pdf

User Manual PZ82

P-517, P-518, P-527, P-528, P-558 Piezo Nanopositioning Systems with Capacitive Sensors
3.0.0
pdf - 939 KB
pdf - 938 KB
pdf

Short Instructions PZ240EKDK

P-5xx, P-6xx, P-7xx Piezo Positionings Systems
3.0.0
pdf - 603 KB

3D Models

zip

P-5x8 STEP

zip - 338 KB