P-518 • P-528 • P-558 Piezo Z/Tip/Tilt Stage

High Dynamics with Large Aperture

Z and tip/tilt stages with 3 axes / Z stages with 1 axis
Vertical tip/tilt angle to 200 µm / 2 mrad, closed loop (to 240 µm / 2.4 mrad open loop)
Parallel kinematics for faster response times and higher multi-axis accuracy
Zero-play, high-precision flexure guide system
Outstanding lifetime due to PICMA® piezo actuators
Clear aperture 66 mm × 66 mm
Highest linearity due to capacitive sensors

Fields of application

  • Metrology
  • Interferometry
  • Photonics / integrated optics
  • Lithography
  • Nanopositioning
  • Scanning microscopy
  • Sample alignment
  • Micromachining

 

Specifications

Datasheet P-518 • P-528 • P-558

Version / Date
2018-02-19
Version / Date
2018-02-19
Version / Date
2017-10-04
Document language
pdf - 1 MB
pdf - 1 MB
pdf - 870 KB

Drawings / Images

Quote / Order

Ask for a free quote on quantities required, prices, and lead times or describe your desired modification. All products available online can be ordered directly.

Downloads

Datasheet

Datasheet P-518 • P-528 • P-558

Version / Date
2018-02-19
Version / Date
2018-02-19
Version / Date
2017-10-04
Document language
pdf - 1 MB
pdf - 1 MB
pdf - 870 KB

Documentation

User Manual PZ82

P-517, P-518, P-527, P-528, P-558 Piezo Nanopositioning Systems with Capacitive Sensors
Version / Date
2013-09-05
Version / Date
2013-09-05
Document language
pdf - 939 KB
pdf - 938 KB

Short Instructions PZ240EKDK

P-5xx, P-6xx, P-7xx Piezo Positionings Systems
Version / Date
4.0.0 2017-02-06
pdf - 635 KB

3-D Models

P-5x8 STEP

zip - 338 KB