P-541.Z Piezo Z and Z / Tip / Tilt Stages

Low Profile, Large Aperture

Low profile for easy integration: 16.5 mm
Clear aperture 80 mm × 80 mm
Vertical and Z / Tip / Tilt Stages
Travel range 100 µm
1 mrad tilt
Enhanced responsiveness & multi-axis precision: Parallel kinematics / metrology
Choice of sensors: Strain gauge (lower cost) or capacitive sensors (higher performance)
Outstanding lifetime due to PICMA® piezo actuators
Combination with long-travel microscopy stages

System properties

System configuration: P-541.ZCD and E-500 modular system with E-503 amplifier and E-509.C1A controller;20g load

Small signal bandwidth: 60 Hz

Settling time (10 % step width): 9 ms

Specifications

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Drawings / Images

PI P-541.Z Drawing

Ordering Information

Downloads

Datasheet

pdf
pdf

PI Datasheet P-541.Z

Piezo Z and Z / Tip / Tilt Stages Low Profile, Large Aperture
pdf - 807 KB
pdf - 797 KB

Documentation

pdf

Short Instructions PZ240EKDK

P-5xx, P-6xx, P-7xx Piezo Positionings Systems
3.0.0
pdf - 603 KB

3D Models

zip

P-541.Z STEP

zip - 704 KB