P-541.Z Piezo Z and Z / Tip / Tilt Stages

Low Profile, Large Aperture

Low profile for easy integration: 16.5 mm
Clear aperture 80 mm × 80 mm
Vertical and Z / Tip / Tilt Stages
Travel range 100 µm
1 mrad tilt
Enhanced responsiveness & multi-axis precision: Parallel kinematics / metrology
Choice of sensors: Strain gauge (lower cost) or capacitive sensors (higher performance)
Outstanding lifetime due to PICMA® piezo actuators
Combination with long-travel microscopy stages

System properties

System configuration: P-541.ZCD and E-500 modular system with E-503 amplifier and E-509.C1A controller;20g load

Small signal bandwidth: 60 Hz

Settling time (10 % step width): 9 ms


P-541.ZCD

P-541.TCD*

P-541.ZSL

P-541.TSL*

P-541.Z0L

P-541.T0L*

Unit

Tolerance

Active axes

Z

Z, θX, θY

Z

Z, θX, θY

Z

Z, θX, θY


Motion and positioning

Integrated sensor

Capacitive

Capacitive

SGS

SGS

Open-loop

Open-loop

Open-loop Z-travel, -20 to 120 V

150

150

150

150

150

150

µm

min. (20 % / -0 %)

Open-loop tip / tilt angle in θX, θY at -20 to 120 V

±0.6

±0.6

±0.6

mrad

min. (20%/-0%) 

Closed-loop Z-travel

100

100

100

100

µm

Closed-loop tip / tilt angle in θX, θY

±0.4

-

±0.4

mrad

Open-loop Z-resolution

0.2

0.2

0.2

0.2

0.2

0.2

nm

typ.

Open-loop resolution in θX, θY

0.02

0.02

0.02

µrad

typ.

Closed-loop Z-resolution

0.5

0.5

2.5

2.5

nm

typ.

Closed-loop resolution in θX, θY

0.08

0.25

µrad

typ.

Linearity error (Z-travel), θX, θY

0.03

0.03

0.2

0.2

%

typ.

Repeatability Z

<2

<2

<10

<10

nm

typ.

Repeatability θX, θY

0.01

0.05

µrad

typ.

Runout θX, θY (motion in Z)

±15

±15

±15

±15

±15

±15

µrad

typ.


Mechanical properties

Stiffness Z

0.8

0.8

0.8

0.8

0.8

0.8

N/µm

±20 %

Unloaded resonant frequency (Z)

410

410

410

410

410

410

Hz

±20 %

Unloaded resonant frequency θX, θY

330

330

330

Hz

±20 %

Resonant frequency @ 200 g (Z)

250

250

250

250

250

250

Hz

±20 %

Resonant frequency @ 200 g, θX, θY

270

270

270

Hz

±20 %

Push / pull force capacity

50 / 20

50 / 20

50 / 20

50 / 20

50 / 20

50 / 20

N

max.


Drive properties

Ceramic type

PICMA® P-885

PICMA® P-885

PICMA® P-885

PICMA® P-885

PICMA® P-885

PICMA® P-885

Electrical capacitance

6.3

6.3

6.3

6.3

6.3

6.3

µF

±20 %

Dynamic operating current coefficient

7.9

7.9

7.9

7.9

7.9

7.9

µA / (Hz × µm)

±20 %


Miscellaneous

Operating temperature range

20 to 80

20 to 80

20 to 80

20 to 80

20 to 80

20 to 80

°C

Material

Aluminum

Aluminum

Aluminum

Aluminum

Aluminum

Aluminum

Mass

750

750

730

730

700

700

g

±5 %

Cable length

1.5

1.5

1.5

1.5

1.5

1.5

m

±10 mm

Sensor connection

Sub-D Special

Sub-D Special

LEMO

3 × LEMO

Voltage connection

Sub-D Special

Sub-D Special

LEMO

3 × LEMO

LEMO

3 × LEMO

* Parallel kinematics design; the maximum displacement for translation and tilt motion cannot be achieved at the same time

Resolution of PI Piezo Nanopositioners is not limited by friction or stiction. Value given is noise equivalent motion with E -503 or E-710 controller.

Recommended controller / amplifier

Single-channel (1 per axis): E-610 servo-controller / amplifier, E-625 servo-controller, bench-top, E-621 controller module

Multi-channel: E-500 modular piezo controller system with E-503 amplifier module (three channels) or E-505 (1 per axis, high-power) and E-509 controller

Single-channel digital controller: E-753 (bench-top)

Multi-channel digital controllers: E-710 / E-725 bench-top, E-712 modular, E-725 high-power, E-761 PCI board

Drawings / Images

PI P-541.Z Drawing

Ordering Information

Downloads

Datasheet

pdf
pdf

PI Datasheet P-541.Z

Piezo Z and Z / Tip / Tilt Stages Low Profile, Large Aperture
pdf - 807 KB
pdf - 797 KB

Documentation

pdf

Short Instructions PZ240EKDK

P-5xx, P-6xx, P-7xx Piezo Positionings Systems
3.0.0
All
pdf - 603 KB

3D Models

zip

P-541.Z STEP

All
zip - 704 KB