P-541.Z • P-541.T Piezo Z Stages / Z and Tip/Tilt Stages

Low Profile, Large Aperture

Low profile for easy integration: 16.5 mm
Clear aperture 80 mm × 80 mm
Travel range to 150 µm
Tip/tilt angle to 1.2 mrad
Parallel kinematics for faster response times and higher multi-axis accuracy
Sensor technology: Inexpensive strain gauge sensors or capacitive sensors for higher performance
Outstanding lifetime due to PICMA® piezo actuators
Combination with microscope stages possible for long travel ranges

Fields of application

  • Scanning microscopy
  • Super-resolution microscopy
  • Biotechnology
  • Mask/wafer positioning
  • Sample positioning
  • Interferometry
  • Metrology

 

Specifications

Datasheet P-541.Z - P-541.T

Version / Date
2018-02-19
Version / Date
2018-02-19
Document language
pdf - 867 KB
pdf - 874 KB

Drawings / Images

Quote / Order

Ask for a free quote on quantities required, prices, and lead times or describe your desired modification. All products available online can be ordered directly.

Downloads

Datasheet

Datasheet P-541.Z - P-541.T

Version / Date
2018-02-19
Version / Date
2018-02-19
Document language
pdf - 867 KB
pdf - 874 KB

Documentation

Short Instructions PZ240EKDK

P-5xx, P-6xx, P-7xx Piezo Positionings Systems
Version / Date
4.0.0 2017-02-06
pdf - 635 KB

3-D Models

P-541.Z STEP

zip - 704 KB