S-303 Piezo Phase Shifter

High-Speed Piezo Phase Shifters with Direct Metrology Option

Resonant frequency 25 kHz for sub-millisecond dynamics
Capacitive sensor option for highest linearity and stability
3 µm travel range
Compact size: Ø 30 mm × 10 mm
Open-loop versions with aperture
Invar option for highest thermal stability

Specifications

pdf
pdf

Datasheet S-303

2015-02-17
2015-02-17
pdf - 906 KB
pdf - 899 KB

Drawings / Images

PI S-303.0Lx Drawing
PI S-303.CDx Drawing
PI S-303 Diagram, A 250 picometer step (0.25 nm) of the S-303 platform, controlled by an E-503 amplifier module and an E-509.C1A servocontroller module. Measured with special ultra-high-resolution capacitive gauge, ±0.02 nm resolution.

Downloads

Datasheet

pdf
pdf

Datasheet S-303

2015-02-17
2015-02-17
pdf - 906 KB
pdf - 899 KB