S-303 Piezo Phase Shifter

High-Speed Piezo Phase Shifters with Direct Metrology Option

Resonant frequency 25 kHz for sub-millisecond dynamics
Capacitive sensor option for highest linearity and stability
3 µm travel range
Compact size: Ø 30 mm × 10 mm
Open-loop versions with aperture
Invar option for highest thermal stability


S-303.CDx

S-303.0Lx

Unit

Tolerance

Active axis

Z

Z

Open-loop travel, at -20 to 120 V

3

3

µm

±20 %

Closed-loop travel

2

µm

Integrated feedback sensor

Capacitive

Resolution, closed-loop / open-loop*

0.03 / 0.03

0.03 / –

nm

Linearity error, closed-loop**

1.0

%

typ.

Repeatability

0.7

nm

typ.

Stiffness

N/µm

±20 %

Push / pull force capacity

0.5

0.5

N

max.

Electrical capacitance

0.9

0.9

µF

±20 %

Dynamic operating current coefficient (DOCC)***

50

50

µA/(Hz × µm)

Resonant frequency, no load

25

25

kHz

±20 %

Operating temperature range

-20 to 80

-20 to 80

°C

Voltage connection

E

VL

Sensor connection

E

Mass

100

30

g

±5 %

Casing material

Al (Invar optional)

Al (Invar optional)

Recommended amplifiers / controllers

E-665.CRE-610.C0E-661.CPE-625.CRE-753E-750

E-663E-610.00E-500 / E-501E-503Optional: E-515 / E-516

*The resolution of PI piezo nanopositioners is not limited by friction or stiction. Value given is noise equivalent motion with E -503 amplifier or E-710 controller.

** With digital controller, analog controllers will provide a linearity of typ. 1 nm.

*** Dynamic Operating Current Coefficient in µA per Hz and µm. Example: Sinusoidal scan of 1 µm at 10 Hz requires approximately 0.5 mA drive current.

http://www.physikinstrumente.de/de/produkte/prdetail.php?sortnr=300900.00

Link zu Erklärungen, die ursprünglich in DATA waren.

Drawings / Images

PI S-303.0Lx Drawing
PI S-303.CDx Drawing
PI S-303 Diagram, A 250 picometer step (0.25 nm) of the S-303 platform, controlled by an E-503 amplifier module and an E-509.C1A servocontroller module. Measured with special ultra-high-resolution capacitive gauge, ±0.02 nm resolution.

Downloads

Datasheet

pdf
pdf

PI Datasheet S-303

Piezo Phase Shifter High-Speed Piezo Phase Shifters with Direct Metrology Option
pdf - 906 KB
pdf - 899 KB