Positioning in High Vacuum (HV) and Ultrahigh Vacuum (UHV)
subnanometer precision, piezo motors in different designs with respect to force, dynamics, and travel range, motorized positioners with specially designed DC or stepper motors that allow larger travel ranges [...] be heated up to 150 °C. Depending on the configuration and control, piezoceramic actuators can be used for translational, rotational, or tilting motion, or they can be used as motors in just as many con [...] screws Bakeout temperature max. 120°C with/ 150°C without measuring system Tab. 1: Different measures taken to achieve the corresponding vacuum class of motorized positioners. HV to 10 -6 hPa: Precision