Piezo Positioning Systems with Parallel Kinematics
linearly in Z direction, which is important, for example, for correcting optical path lengths (phase shifters). The following equations serve to calculate the tilt angle and the travel range in Z. A, B and [...] moment of inertia of the mirror substrate give the system's resonant frequency according to the following equation: Resonant frequency of a piezo tilt system with mirror f' Resonant Frequency of the Platform