Comparison: Nanopositioning Sensor Technologies
of a thin metal or semiconductor foil (piezo resistant), which is attached to the piezo ceramics or, for improved precision, to the guiding system of a flexure stage. This type of position measurement is [...] of the nanopositioning system. The information on resolution, linearity, and repeatability in the respective data sheet reflect the specifications of the overall system, including controller, mechanics [...] Right Position Sensor Technology PI offers the widest range of high-dynamics and high-resolution nanopositioning systems worldwide. Their linearity and repeatability would not be possible without highest-resolution