Features & Advantages of Hybrid Stages

• Hybrid Sytem Combines Advantages of Piezoelectrics and Electromagnetic Drives
• 2 Nanometer Linear Encoder Resolution
• High Holding Forces with Minimum Power Consumption, without Counterbalancing the Load
• Active Compensation of Stick/Slip During Startup and Settling
• Active Backlash Compensation
• Excellent Velocity Control
• Millisecond Settling to Nanometer Accuracy
• Reliable Execution of Minimal Increments

M-714 Heavy-Duty Nanopositioning Z-Stage
The M-714 Z-stage was designed from the ground up to use the hybrid drive technology. A high gear reduction ratio enables the M-714 to position loads up to 10 kg with nanometer precision, even in the vertical direction. Compared to high-resolution magnetic linear drives, the hybrid principle allows high holding forces with minimum power consumption, without counterbalancing the load. The angular deviation is less than ±10 µrad over the entire travel range of 7 mm. The high-performance drive components, including ballscrew, bearings, motor and gearhead are chosen for minimum mechanical play and friction.

Absolute Accuracy
The servo-control loops for both the motorized and the piezo drive use the same position sensor. The result is a motion system with hundreds of millimeters travel but with the precision of a piezo-based nanopositioner. The resolution and the positioning accuracy depend on the choice of the feedback sensor. PI hybrid systems currently use optical linear encoders with a resolution of 2 nm. Depending on the stage, a minimum incremental motion or a repeatability of 4 nm can be achieved over the entire travel range.

Typical Applications
Surface Inspection, Microscopy, Laser Technology, Interferometry Metrology

Datasheets and Brochures
>> M-714 Online Datasheet
>> M-714 PDF Datasheet
>> PDF Brochure: Hybrid Technology

Overview Z-Stages
>> Piezo Flexure Z-Stages
>> Motorized Z-Stages
>> Piezo Z-Actuators (Stack Actuators)