For laser beam control, piezo-driven tip/tilt mirror systems not only offer the required accuracy but high accelerations and a great dynamic bandwidth of over 100 Hz as well. They are compact and can be integrated in higher-level systems, even in small spaces. They allow an optical deflection angle of up to 6°, extremely fast response behavior (10 ms to 1 ms with mirror) as well as position resolutions into the nanoradian range.
In the case of tip/tilt mirror systems with several motion axes, piezo drives are used in parallel-kinematics positioning systems. Unlike serial systems, there is only one moving platform with a common pivot point. Integrated high-resolution position sensors ensure linearity values of better than 0.25% over the full travel range and a repeatability of typically 5 µrad.