Linear Stages & Actuators
Stages, Scanners and Actuators for Single-Axis Positioning
- Products
ProductsPI is the world's leading provider of nanopositioning products and systems. All key technologies are developed, manufactured and qualified in-house by PI: Piezo components, actuators and motors, magnetic drives, guiding systems, nanometrology sensors, electronic amplifiers, digital controllers and software.- Linear Stages & Actuators
- Piezo Stages
Piezo Flexure StagesNanopositioning Stages and Scanners for Travel Ranges to 1.5 mm
- Stages with Motor/Screw –Drives
Linear Stages with Motor/Screw –DrivesStages and Actuators for Travel Ranges up to 1 m
- Stages with Linear Motors
Linear Stages with Linear MotorsDynamic Stages and Actuators with Friction-Free Magnetic Direct Drive
- Stages with Piezomotor Drives
Compact Linear Stages with Piezomotor DrivesNanopositioning Stages and Actuators with Larger Travel Ranges
- Stages with PiezoWalk® Stepping Drive
Compact Linear Stages with PiezoWalk® Stepping DrivesNanometer Precision with a High Feed Force
- Piezo Stages
- Rotation Stages
Rotation StagesMotorized Rotation Stages and Goniometers
- Stages with Worm Gear Drives
Rotation Stages with Worm Gear DrivesPrecise, Smooth Continuous 360° Motion
- Stages with Magnetic Drive
Rotation Stages with Torque Motor Direct DrivesFor Particularly Smooth Synchronous Running Even at Low Velocities
- Stages with Piezomotor
Rotation Stages with PiezomotorFor Particularly Compact Sizes
- Stages with Worm Gear Drives
- XY Stages
XY StagesFor Sample Positioning in Microscopy or Industrial Production
- Piezo Stages
XY Piezo StagesHigh-Precision 2-Axis Nanopositioning Systems
- Stages with Motor/Screw –Drives
XY Stages with Motor/Screw –DrivesStable Platforms for Travel Larger Travel Ranges
- Stages with Magnetic Drive
XY Stages with Magnetic DrivePIglide Air Bearing Stages for Scanning or High-Resolution Positioning
- Stages with Piezomotor
XY Stages with PiezomotorHigher Stability and Very Low Profiles
- Piezo Stages
- Hexapods / Parallel Kinematics
Hexapods / Parallel KinematicsHexapods, SpaceFABs and 6-Axis Positioning Stages
- Piezo Stages
6-Axis Piezo StagesParallel Metrology for Active Error Compensation
- Hexapods with Motor / Screw - Drives
Hexapods with Motor / Screw - DrivesFor Loads of up to 1000 kg Accurately to the Nearest Micrometer
- Hexapods with Magnetic Drive
Hexapods with Magnetic DriveFor High Velocity and High Dynamics
- Hexapods with Piezomotor
Hexapods with PiezomotorCompact Micro Robot Systems
- Hexapods with PiezoWalk® Stepping Drives
Hexapods with PiezoWalk® Stepping DrivesSpace-Saving Designs for Ultra-High Precision
- Piezo Stages
- XYZ Scanners
XYZ ScannersFor Positioning and Scanning on 3 Axes
- Piezo Flexure Scanners
XYZ Piezo Flexure Scanners3-Axis Nanopositioning Scanners of Maximum Precision
- Piezo Flexure Scanners
- Z-Tip-Tilt Platforms
Z-Tip-Tilt PlatformsZ and Tip/Tilt Platforms, Tip/Tilt Mirrors, and Active Optics
- Piezo Platforms
Z-Tip-Tilt Piezo PlatformsVertical Positioners and Tip/Tilt Scanning Stages
- Platforms with Piezomotor
Z-Tip-Tilt Platforms with PiezomotorHigh Holding Force and Resolution
- Platforms with PiezoWalk® Stepping Drives
Z-Tip-Tilt Platforms with PiezoWalk® Stepping DrivesHigh-Precision Positioning with Outstanding Lifetime
- Piezo Platforms
- Piezoceramic Components
Piezoceramic ComponentsPiezoelectric Elements in Different Shapes
- Discs, Rods and Cylinders
Piezoceramic Discs, Rods and Cylinders
- Plates and Blocks
Piezoceramic Plates and Blocks
- Rings
Piezoceramic Rings
- Tubes
Piezoceramic Tubes
- Spheres and Hemispheres
Piezoceramic Spheres and Hemispheres
- Bending Elements
Piezoceramic Bending Elements
- Discs, Rods and Cylinders
- Piezoceramic Actuators
Piezoceramic ActuatorsPiezoelectric actuators and Sensors.
- PICMA® Piezo Linear Actuators
PICMA® Piezo Linear ActuatorsPICMA® multilayer actuators for an up to 10 times higher lifetime and operating time than conventional multilayer piezo actuators.
- PICMA® Piezo Bender Actuators
PICMA® Piezo Bender ActuatorsMultilayer bending actuators: large displacement and high dynamics. Their bimorph structure ensures bidirectional displacement.
- PICA Piezoelectric Stack Actuators
PICA Piezoelectric Stack ActuatorsStacked piezo linear actuators with operating voltages to 1000 V: High reliability, large specific displacement and high forces.
- PICA Shear Actuators
PICA Shear ActuatorsMulti-axis and shear actuators in stacked design offer excellent dynamics combined with minimum electrical power requirements.
- DuraAct Piezoelectric Transducers
DuraAct Piezoelectric TransducersDuraAct patch transducers convert electrical voltage into mechanical energy and vice versa; as actuator, sensor or as energy generator.
- Picoactuator® Piezoelectric Crystal
Picoactuator® Piezoelectric CrystalThe motion of the Picoactuator® piezo crystals is highly linear and almost hysteresis-free and consequently suited for high-dynamics applications.
- Tube Actuators
Piezo Tube ActuatorsRadially and axially contracting piezo tubes are often used for creating dynamic scanning motions and as fiber stretchers.
- PICMA® Piezo Linear Actuators
- Controllers & Drivers
Controllers & DriversDigital and Analog Motion Control
- Piezo Controllers
Digital and Analog Piezo ControllersControllers, Drivers, Amplifiers for Piezo Actuators & Piezosystems
- Motion Controllers for Motor / Screw - Drives
Motion Controllers for Motor / Screw - DrivesFor DC Servo Motors, Stepper Motors
- Motion Controllers for Magnetic Drives
Motion Controllers for Magnetic DrivesFor PIMag® Magnetic Direct Drives
- Motion Controllers for Piezomotors
Motion Controllers for PiezomotorsFor PIShift, PiezoMike and PILine® Motors
- Motion Controllers for PiezoWalk® Stepping Drives
Motion Controllers for PiezoWalk® Stepping DrivesFor NEXLINE® and NEXACT® Piezo Stepping Drives
- Modular Controller Systems
Modular Controller SystemsFlexible Systems for Customers Applications
- Piezo Controllers
- Air Bearing Guiding Sytems
Air Bearing Guiding SytemsMechanical Guide Components and Magnetic Bearings
- Linear Stages & Actuators
- Applications
Applications & MarketsPI positioning systems are employed where technology is pushed forward in industry and research. This is done, for example, in semiconductor manufacturing, in medical engineering, in biotechnology, in plant engineering, in surface metrology, or in astronomy.
- Automotive
AutomotiveBecause the need for multi-axis and also precision robots in production and quality processes is on the increase, industry is looking out for new types of robotics. PI offers parallel-kinematic hexapods for these tasks.
- Scientific Instrumentation
Scientific InstrumentationThe term "scientific instrumentation" covers a variety of different applications, starting with microscopy via beamline processes through to the wide field of laboratory automation.
- Hexapod Systems for ALMA
Hexapod Systems for ALMAUnder the extreme conditions of the Atacama Desert, PI hexapods align the subreflectors to the large main reflectors of the ALMA radio telescopes.
- Double-Crystal Monochromator
Double-Crystal Monochromator for an X-Ray SpectrometerThe PI Beamline Instrumentation division’s aim is to develop application oriented solutions e.g., this monochromator for an X-ray spectrometer.
- Materials Research in High Vacuum
Materials Research in High VacuumPI provides standard and custom high vacuum compatible positioning systems for materials research with high-energy X-rays.
- Active Vibration Isolation with Piezo Actuators
Active Vibration Isolation with Piezo ActuatorsActive vibration isolation reduces settling times, increases precision in measurement and production sequences and achieves high throughput rates.
- Hexapod Systems for ALMA
- Semiconductor Technology
Semiconductor TechnologyLithographic processes are the reason why chips are getting smaller and smaller and why extremely fine structures can be realized on silicon wafers. Piezo drives have made these technical advances possible with their performance and reliability.
- Microscopy
MicroscopyImaging processes increase efficiency across a number of fields, ranging from medical engineering to pharmaceutical research and manufacturing of semiconductors.
- Atomic Force Microscopy
AFM Scanner for Atomic Force MicroscopySpecimen positioning on AFM scanners for atomic force microscopy is performed with piezo-based scanning stages which thus play a key role.
- High-Speed Microscopy
High-Speed Microscopy for Quality ControlSpecimen positioning on AFM scanners for atomic force microscopy is performed with piezo-based scanning stages which thus play a key role.
- White light interferometry
3-D Surface Inspection With Piezo-Based Positioning Systems from PIHigh-resolution camera systems are combined with white light interferometry for 3-D surface inspection with picometer resolution.
- Atomic Force Microscopy
- Photonics Packaging
Photonics PackagingSilicon photonics allows data rates into theTbit/s range and is therefore suitable for computer-aided services that require the highest possible transmission speeds.
- Photonics Packaging
Automated Photonics PackagingAn automated assembly and alignment system can reduce the manufacturing process for silicon photonics to only a few minutes. However, handling the delicate waveguides is indeed a major challenge as the integration of the light sources at a wafer level and connection of the optical inputs and outputs are difficult to perform.
- Optical Fiber Alignment
Simultaneos Testing of Optical Components in Silicon PhotonicsSilicon photonics presents new challenges for the production of components as well as testing and slicing the wafers.
- Photonics Packaging
- Medical Technology
Medical TechnologyProgress in pharmaceutical research, diagnostics, and therapy requires high-performance and precise position systems. In addition to high positioning precision, requirements for the drives often include compact dimensions, low energy consumption, speed, and high reliability.
- Endoscopy
Chip-on-the-Tip Video Endoscopes with Miniature DrivesPiezomotors and magnetic miniature drives offer the option of better focus and zoom functions in chip-on-the-tip video endoscopes.
- Ophthalmology
High-Precision Drives in Ophthalmic SurgeryThe control and focusing of laser beams in ophthalmic surgery requires accurate positioning systems, such as piezo-driven tip/tilt mirror systems.
- Magnetic Resonance Imaging
Nonsensitive Drives for Magnetic Resonance TherapyPiezo drives are well suited for magnetic resonance therapy, because they are not influenced by strong magnetic fields.
- Optical Coherence Tomography
Piezo Technology and Optical Coherence Tomography (OCT)Piezo actuators and drives, e.g., PILine® OEM motors, ensure the high precision and position stability required for optical coherence tomography (OCT).
- Pipetting
Piezomotors for Pipetting and NanodispensingPiezomotors are suited for pipetting with small devices and sample separations and are able to move the pipettes in the vertical direction.
- Precision Dosing
Dynamic Drives for Precision Dosing with NanodispensersPiezo actuators are ideal for precision dosing with nanodispensers: They can switch valves directly, and can also work against a closing spring.
- Micropumps
Piezoelectric Micropumps – Compact Design and High PerformancePiezoelectric micro-diaphragm pumps offer high performance on small space – the drives allow a continuous flow and a variable flow rate.
- Image Stabilization
Image Stabilization and Microscanning with Piezo ScannersFast, piezo-based scanners operate with the necessary velocities in the video frequency range for image stabilization and microscanning.
- Confocal Microscopy
Adjustment of the Focal Planes in Confocal MicroscopyConfocal microscopy is used to detect the structure of the sample surface through the shifting of the focal plane, for example in dermatology.
- Adaptive Diaphragm Positioning
Adaptive Diaphragm PositioningIn radiation therapy, the individual leaves are adjusted so that the healthy tissue offers the optimum protection from the radiation.
- Endoscopy
- Materials Research
Materials ResearchEfficiency has become an important buzzword these days. Materials research has paid a major contribution as the results have, for example, optimized processing methods. Methods such as X-rays and lasers or white light interferometry demand precise positioning of the specimens to be examined and of optics or beam control.
- Parallel Kinematics for Materials Research
High-Load Parallel Kinematics for Materials ResearchThe high-energy X-rays at beamlines provide numerous possibilities for materials research, such as checking welding seams of workpieces.
- Laser Beam Control
Piezo Drives for Laser Beam ControlLasers are tools that can be used in many areas of application. At the same time, the laser beam control requires precision, dynamics, and reliability.
- Parallel Kinematics for Materials Research
- Mechanical Engineering
Mechanical EngineeringMechanical engineering and manufacturing technology require fast, reliable and energy-saving drive components. The spectrum ranges from piezo actuators to six-axis parallel kinematics which can communicate directly with CNC controls.
- Electrical Discharge Machining
Piezo Actuators Accelerate Electrical Discharge MachiningPrecision components are manufactured using electrical discharge machining, often in large numbers. Vibrating piezo actuators make a crucial contribution here.
- Hexapods in Mechanical Engineering
Hexapods in Mechanical EngineeringPI hexapod 6-axis positioning systems can handle loads from 2 kg to several tons. Ideal for precision mechanical engineering applications.
- Electrical Discharge Machining
- Automation
AutomationPiezo drives, magnetic direct drives, and hexapods are part and parcel of automation today. They operate precisely and reliably and have proven themselves under rugged conditions.
- Hexapods in Microproduction
Hexapods in MicroproductionWhat do optical components and glass fibers in photonics, mobile devices, and high-quality wristwatches all have in common?
- Hexapods for Quality Assurance
Hexapods for Quality AssuranceMicroproduction technology makes high-precision positioning systems absolutely necessary for both assembly and quality assurance.
- Magnetic Direct Drives
Magnetic Direct DrivesMagnetic direct drives, which include voice-coil actuators and linear drives, are often predestined here as the best solutions for many reasons.
- Motion Simulation with Hexapods
Motion Simulation with HexapodsMotion simulation with hexapods with CIPA certificate from PI (Physik Instrumente) – vibrating tables are used for testing resistance to vibration.
- Flexibility in Dimensional Measuring
Hexapod Systems in AutomationHexapods allow for an outstanding flexibility for a variety of samples of in-line automation systems by minimizing the space for motion robotics.
- Motion Compensation with Hexapods
Motion Compensation with HexapodsDynamic hexapods with piezo drives: Best conditions for motion compensation.
- Fast Piezo Ultrasonic Drives Advance Technology
Fast Piezo Ultrasonic Drives Advance TechnologyWhen increased demands are placed on an application, ultrasonic piezo motors can prove to be a good alternative, as they can be used in many ways.
- Hexapods in Microproduction
- Automotive
- Technology
Know-How & TechnologyPI combines its long-term experience in micro and nanopositioning technology with in-depth knowledge in the fields of mechanics, electronics, sensor engineering, and software. Thus, PI is able to offer its customers the most advanced drive technologies and system solutions.
- Piezo Technology
Piezo TechnologyPI Ceramic offers a wealth of experience in the manufacturing of piezoceramic materials, components, and actuators. The piezoceramic materials can be adapted individually to perfectly fit the later use of the piezo components.
- Fundamentals of Piezo Technology
Fundamentals of Piezo TechnologyPhysical basics and explanations of piezo electricity and electromechanics.
- Properties of Piezo Actuators
Properties of Piezo ActuatorsCharacteristics of piezoceramic actuators: Displacement modes, forces and stiffnesses, dynamics. Ambient conditions.
- Piezoceramic Materials
Piezoceramic MaterialsPI Ceramic offers a variety of different piezoelectric materials including lead-free materials.
- PICMA® Technology
PICMA® TechnologyHighly reliable and extended lifetime through the patented manufacturing process for multilayer actuators.
- Manufacturing Technology
Manufacturing TechnologyPI Ceramic offers a wide range of manufacturing technologies: Pressing or tape technology, assembling technology and testing procedures.
- Integrated Piezo Actuators
Integrated Piezo ActuatorsTo avoid pull forces, these piezo elements are provided with a mechanical preload in mechanical cases or by means of flexure joints.
- Fundamentals of Piezo Technology
- Piezoelectric Drives
Piezoelectric DrivesDepending on the configuration and control, piezoceramic actuators can be used to create translational motions or as motors with a virtually unlimited travel range. The choice of drive depends on the requirements of the application.
- Piezo Actuators
Piezo Actuators With and Without GuidingPiezoelectric actuators offer sub-nanometer resolution and very short response times, making them ideally suitable for nanometer-precision positioning at high dynamics.
- PiezoWalk® Stepping Drives
PiezoWalk® Stepping DrivesPiezoWalk® drives were developed more than 10 years ago for the semiconductor industry, a demanding industry when it comes to reliability, position resolution and long-term stability.
- PILine® Ultrasonic Piezomotors
PILine® Ultrasonic PiezomotorsUltrasonic piezomotors dispense with the mechanical complexity of classical rotary motor/gear/leadscrew combinations in favor of costs and reliability.
- Piezo Inertia Drives
Piezo Inertia DrivesInertia Drives are space-saving and low-cost piezo-based inertia drives with relatively high holding forces and a travel range that is only limited by the length of the moving rod.
- PiezoMike Linear Actuators
PiezoMike Linear ActuatorsCompact, low-cost inertia drive principle (stick-slip). When at rest, the drive is self-locking, requires no current and generates no heat. It holds the position with maximum force.
- Comparison: Piezo Motors & Drive Technologies
Comparison: Piezo Motors & Drive TechnologiesPIs drive technologies in comparison: Piezo motors, stepping drives, ultrasonic drives and piezo inertia drives.
- Piezo Actuators
- Electromagnetic Drives
Electromagnetic DrivesRotating electric motors such as DC or stepper motors are used in connection with screw or worm drives. Stepper motor systems with high-resolution encoders can perform minimum incremental motions of 10 nm with high reliability and repeatability.
- Rotating Electric Motors
Rotating Electric Motors from PIRotating electric motors such as DC or stepper motors are used in connection with screw or worm drives.
- PIMag® Magnetic Direct Drives
PIMag® Magnetic Direct DrivesIn particular in terms of wear and dynamics, magnetic direct drives offer advantages compared to common spindle-based technologies.
- PIMag® 6D Magnetic Levitation
PIMag® 6D Magnetic Levitation at Six Levels of FreedomPIMag® 6D is an electromagnetic positioning system in which the passive platform levitates on a magnetic field and is actively guided by it.
- Hybrid Concept
Piezo & Motor Hybrid ConceptIn the hybrid concept, the DC servo motor (large travel ranges) and the piezo drive (nanometer accuracy) are combined with one another.
- Rotating Electric Motors
- Parallel Kinematics
Parallel KinematicsIn a parallel-kinematic multi-axis system, all actuators act directly on a single moving platform. This means that all axes can be designed with identical dynamic properties, thus reducing the moved mass considerably. Hexapods are used for moving and precision positioning, aligning and displacing loads in all six degrees of freedom, i.e., three linear and three rotational axes.
- Parallel Kinematics
Piezo Positioning Systems With Parallel KinematicsIn a parallel-kinematic multi-axis system, all actuators act directly on a single moving platform.
- Multi-Axis Positioners
Multi-Axis Positioners and Stewart PlatformsHexapod platforms are used for precision positioning and alignment of loads in all six degrees of freedom, three linear axes, and three rotational axes.
- Hexapod as Motion Simulator
Hexapod as Motion SimulatorMotion simulators have higher motion dynamics requirements (shakers).
- Software for Hexapods
Hexapod 6-Axis Motion Controller and SoftwareDue to their parallel kinematic structure, Hexapods necessitate a particularly complex control system.
- Parallel Kinematics
- Sensor Technologies
Sensor TechnologiesThe linearity and repeatability achieved are not possible without highest-resolution measuring devices. Accuracies in the range of a few nanometers and below require a position measurement method that can also detect motion in this range.
- Capacitive Sensors
Capacitance Nano-SensorsCapacitive sensors are the metrology system of choice for the most demanding nanopositioning applications.
- Incremental Sensors
Linear Scale Encoders for Nano-Metrology & Nano-PositioningPI uses incremental measurement systems for longer travel ranges, starting from approximately one millimeter. These sensors, which in most cases are optical sensors, achieve position resolution down to the picometer range.
- PIOne Optical Nanometrology Encoder
PIOne Optical Nanometrology EncoderThe PIOne high-resolution linear sensor developed by PI ensures a position resolution of far less than one nanometer with adequate measurement analysis.
- Comparison: Position Sensor Technologies
Comparison: Nanopositioning Sensor TechnologiesPositioning systems that need to provide accuracies in the range of a few nanometers and below require a position measurement technique that can also detect motion in this range.
- Capacitive Sensors
- Controllers & Software
Controllers & SoftwareFast settling or extremely smooth low speed motion, high positional stability, high resolution and high dynamics – the requirements placed on piezo systems vary greatly and need drivers and controllers with a high degree of flexibility.
- Digital & Analog Interfaces
Digital & Analog InterfacesFast USB or TCP/IP interfaces as well as RS-232 are the standard interfaces supported by modern digital controllers from PI. Furthermore, PI also provides digital or analog real-time-capable interfaces.
- Control of Piezo Actuators
Piezo Controllers & Drivers for Nanopositioning SystemsCharacteristic properties of piezo actuators include high feed forces and fast response. Since piezoelectric actuators react to even the smallest change in voltage with a motion, noise or drift in the control must be avoided.
- Digital Motion Controllers
Digital Motion ControllersDigital technology opens up possibilities for improving performance in control engineering which do not exist with conventional analog technology.
- Software
Motion Control Software from PIAll positioning systems from Physik Instrumente (PI) and piezo and motion controllers and drivers are supported by a solid software package.
- Digital & Analog Interfaces
- Guiding Systems & Force Transmission
Guiding Systems & Force TransmissionFlexure joints, mechanical guide components or magnetic bearings? Which kind of guiding system PI uses in its products depends on parameters such as travel range, required precision, load, lifetime and ambient conditions.
- Classical Guiding Systems
Comparison: Classical Guiding Systems and Force TransmissionPositioners with travel ranges from several millimeters to one meter usually utilize traditional mechanical guide components such as ball bearings.
- Flexure Guiding Systems
Flexure Guiding Systems for Nanopositioning & Piezo ActuatorsFlexure guides from PI have proven their worth in nanopositioning. They guide the piezo actuator and ensure a straight motion without tilting or lateral offset.
- Magnetic Bearings
Magnetic Levitation & Precision Bearings for Nano-PositioningMagnetic levitation allows excellent guiding accuracy in a plane, both linear and rotational.
- PIglide Air Bearing Technology
PIglide Air Bearing TechnologyMulti-axis motion with nanometer precision and without friction.
- Classical Guiding Systems
- Vacuum
Vacuum Compatible Linear & Rotary Stages, UHV PositionersCareful handling, adequate premises: PI does not only have the necessary equipment for the qualification of materials, components and final products, but also has many years of experience with regard to HV und UHV positioning systems.
- Metrology
MetrologyPI qualifies its products with external measuring equipment. These are calibrated in part and traceable to a national standard. Using the PIOne incremental encoder and capacitive sensors, PI manufactures own metrology for inclusion in PI products.
- Heavy Load Hall
Heavy Duty Hall for Positioning Systems Weighing Several TonsThe product range from a two-ton Hexapod to a ten-gram nanopositioner requires that PI can both manufacture and qualify these systems. For this reason, PI operates a heavy duty hall at its location in Karlsruhe for the assembly and measurement of masses up to five tons.
- Piezo Technology
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- OEM Solutions
OEM SolutionsCustomer- and application-specific product developments form the basis for success at PI. To this purpose, requirements have to be understood and a technological solution has to be found. As the PI Group manufactures all key technologies in-house, both technology and production can be adapted perfectly to fulfill the requirements.
- System Integration
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PI Glossary for Technical TermsFind useful explanations of technical terms in the PI Glossary.
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- About PI
About PIPI stands for technical excellence and continuous advance in precision positioning – driven by the passion for technology and its use in customer applications. The target of the PI Group is to develop this market and technological leadership even further and therefore secure a decisive competitive advantage for its customers.
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Facts and FiguresNovel drive concepts, products and system solutions have led to a continuous growth in market shares of the PI Group and a healthy company development in the past years.
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Fractal Manufacturing Structure at PIProduction model for high efficiency and quality.
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At PI CeramicAs a future-oriented and internationally active company, we can offer you a secure job with exciting tasks and interesting perspectives. A broad range of expertise in the complex development and manufacturing process of functional ceramic components combined with state-of-the-art components ensure the highest quality. We supply piezoceramic solutions to all important high-tech markets. To further develop our leading role in the world market, we expect excellence from our employees.
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