Precision Motion and Positioning due to High-Resolution Measuring Technology

External Interferometer vs. Internal Sensor

Jonas Schansker, development engineer for sensor technology at PI, has written a whitepaper describing the control of PI positioners using a Zygo interferometer. He explains the experimental setup, compares the measuring results by using the interferometers to those done by the internal sensor, and deals with the applicability of using an interferometer for measuring technique as well as the exceptions.

Read more on „Controlling PI Positioners with External Zygo Interferometer“ in the new whitepaper!

Download

Whitepaper: Controlling PI Positioners with External Zygo Interferometers

Version / Date
WP4017E 2018-11
Version / Date
WP4017D 2018-11
Document language
pdf - 637 KB
pdf - 1 MB





About this Author

Kathrin Mössinger

Global Campaign Manager, Physik Instrumente (PI) GmbH & Co. KG

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