NEW

A-68x PIglide RLA Rotation Stage with Air Bearings, Large Aperture

Friction-free, Motorized

A-68x PIglide RLA Rotation Stage with Air Bearings, Large Aperture
Product Description Specifications Downloads Quote / Order
  • 365 mm diameter motion platform, 260 mm diameter aperture
  • Low profile
  • Eccentricity and flatness < 300 nm

Product overview

The directly driven flat rotation stages of the PIglide RLA series are designed for the highest precision. They have a low profile and a large clear aperture. The RLA stages offer a superior travel accuracy, flatness, and wobble performance.

3-Phase torque motor

  • Brushless
  • Low cogging torque

Absolute encoder (optional)

Absolute encoders supply explicit position information that enables immediate determination of the position. This means that referencing is not required during switch-on, which increases efficiency and safety during operation.

Accessories and options

  • Incremental or absolute encoder
  • PIglide filter and air preparation kit
  • Single or multi-axis motion controllers and servo drives
  • Multi-axis/customized setups
  • Base plates made of granite and systems for reducing vibration

Application fields

Tomography, beamline systems, wafer metrology, wafer inspection, measuring technology, inspection systems, calibration, scanning.

Thanks to the friction-free motion, no particles are formed, which makes PIglide stages ideal for cleanroom applications.

Specifications

Datasheet

Datasheet A-68x

Version / Date
2020-04-08
Version / Date
2020-04-08
Document language
pdf - 356 KB
pdf - 360 KB

Downloads

Datasheet

Datasheet

Datasheet A-68x

Version / Date
2020-04-08
Version / Date
2020-04-08
Document language
pdf - 356 KB
pdf - 360 KB

Documentation

Documentation

User Manual A688D0001

A-688 Series Large Clear Aperture Rotary Air Bearing Stage
Version / Date
1.0 / 2020-04-01
Document language English
Request download link

3-D Models

3-D Models

3-D model A-68x

Version / Date
2020-04-01
Request download link

Quote / Order

Ask for a free quote on quantities required, prices, and lead times or describe your desired modification. All products available online can be ordered directly.

A-688.A100 NEW!
PIglide RLA rotation stage, air bearing, 365 mm motion platform diameter, 260 mm diameter aperture, low profile, incremental angle measuring system with sin/cos signal transmission, brushless 3-phase torque motor
A-688.B100 NEW!
PIglide RLA rotation stage, air bearing, 365 mm motion platform diameter, 260 mm diameter aperture, low profile, absolute angle-measuring system with BiSS-C signal transmission, brushless 3-phase torque motor