The ACS motion controllers are also EtherCAT masters, responsible to managing all the nodes (drives, I/Os, sensors) that are connected to the EtherCAT network. They have a modular design, are scalable, and communicate with higher-level machines or the system control via Ethernet. All control loops, current, velocity, and position are executed at a frequency of 20 kHz which is a pre-requisite for achieving high dynamics with minimal errors.
The motion controllers optimize step-and-settle times by utilizing unique control algorithms, such as ServoBoost, as well as by profile shaping for example, which prevents the excitation of vibrations.
Proprietary and patented features such as NanoPWM enable to achieve dynamic range of current control of higher than 100,000:1 and as a result to achieve nanometer level of tracking errors while scanning a wafer and standstill jitter of sub-nanometer when doing metrology.
In addition, there is also extensive trigger functionality, e.g., for laser applications or inspection functions. The integrated 3-DOF compensation of positioning errors and yaw compensation for gantry solutions make it possible to realize applications with the highest demands on accuracy.
The proprietary Servo-Boost algorithm identifies disturbances in real time, identifies the root cause and minimizes its effect. It simplifies tuning and achieving optimization of the performance in the case of changing loads, interactions between different axes mounted on the same frame, and robustness overcoming many types of real disturbances. The result is highly stable and robust control with high positioning accuracy and extremely short settling times.