A-123.050B1Z NEW!
PIglide vertical linear stage with air bearing; ironless 3-phase linear motor; 50 mm travel range; 10 kg payload; 500 mm/s maximum velocity; absolute linear encoder, 1 nm sensor resolution, BiSS-C
NEW
A-123 Z PIglide Vertical Linear Stage with Air Bearing
High-Performance Vertical Nanopositioning Stage
- Linear stage with pneumatic counterbalance for vertical mounting
- Ideal for scanning applications and high-precision positioning tasks
- Cleanroom-compatible
- Travel ranges 50 mm, 100 mm, and 150 mm
- Sensor resolution 1 nm
A-123, dimensions in mm
A-123 Z PIglide Vertical Linear Stage with Air Bearing
Product Description
Specifications
Downloads
Quote / Order
Product overview
The stages of the PIglide series are equipped with a servo drive linear motor with preloaded air bearings and integrated optical linear encoder. The combination of these noncontact components results in a friction-free motion platform that offers the highest performance, quality, and lifetime.
A high-force linear motor can drive the stage to maximum velocity within a few milliseconds and the high loadcapacity allows for payloads up to 10 kg. The laterally opposed, actively preloaded air bearing design allows mounting in any orientation.
Accessories and options
- PIglide filter and air preparation kit
- Single and multi-axis motion controllers
- XY setups and individual configurations
- Drag chain variants
- Models with brake for avoiding collisions in case of a drop in air pressure
- Base plates made of granite and systems for reducing vibration
- Manual adjustment of the default value for the payload, option for automatic adjustment available
- Customizations available
Application fields
PIglide positioning systems are ideally suited for high-precision metrology, photonics, and precision scanning applications in semiconductor or flat screen manufacturing.
Thanks to the friction-free motion, no particles are formed, which makes PIglide stages ideal for use under cleanroom conditions.
Specifications
Specifications
| Motion | A-123.050B1Z | A-123.050B1ZB | A-123.100B1Z | A-123.100B1ZB | A-123.150B1Z | A-123.150B1ZB | Tolerance |
|---|---|---|---|---|---|---|---|
| Active axes | Z | Z | Z | Z | Z | Z | |
| Travel range in Z | 50 mm | 50 mm | 100 mm | 100 mm | 150 mm | 150 mm | |
| Acceleration in Z, unloaded | 20 m/s² | 20 m/s² | 20 m/s² | 20 m/s² | 20 m/s² | 20 m/s² | max. |
| Maximum velocity in Z, unloaded | 500 mm/s | 500 mm/s | 500 mm/s | 500 mm/s | 500 mm/s | 500 mm/s | |
| Straightness error in X | ± 1 µm | ± 1 µm | ± 1 µm | ± 1 µm | ± 1 µm | ± 1 µm | max. |
| Straightness error in Y | ± 1 µm | ± 1 µm | ± 1 µm | ± 1 µm | ± 1 µm | ± 1 µm | max. |
| Angular error around X | ± 10 µrad | ± 10 µrad | ± 15 µrad | ± 15 µrad | ± 20 µrad | ± 20 µrad | max. |
| Angular error around Y | ± 10 µrad | ± 10 µrad | ± 15 µrad | ± 15 µrad | ± 20 µrad | ± 20 µrad | max. |
| Positioning | A-123.050B1Z | A-123.050B1ZB | A-123.100B1Z | A-123.100B1ZB | A-123.150B1Z | A-123.150B1ZB | Tolerance |
| Positioning accuracy in X, uncalibrated | ± 1 µm | ± 1 µm | ± 1 µm | ± 1 µm | ± 1 µm | ± 1 µm | typ. |
| Positioning accuracy in Z, calibrated | ± 0.3 µm | ± 0.3 µm | ± 0.3 µm | ± 0.3 µm | ± 0.3 µm | ± 0.3 µm | typ. |
| Bidirectional repeatability in Z | 0.15 µm | 0.15 µm | 0.15 µm | 0.15 µm | 0.15 µm | 0.15 µm | typ. |
| Integrated sensor | Absolute linear encoder | Absolute linear encoder | Absolute linear encoder | Absolute linear encoder | Absolute linear encoder | Absolute linear encoder | |
| Sensor signal | BiSS-C | BiSS-C | BiSS-C | BiSS-C | BiSS-C | BiSS-C | |
| Sensor resolution | 1 nm | 1 nm | 1 nm | 1 nm | 1 nm | 1 nm | |
| Drive properties | A-123.050B1Z | A-123.050B1ZB | A-123.100B1Z | A-123.100B1ZB | A-123.150B1Z | A-123.150B1ZB | Tolerance |
| Drive type | Ironless 3-phase linear motor | Ironless 3-phase linear motor | Ironless 3-phase linear motor | Ironless 3-phase linear motor | Ironless 3-phase linear motor | Ironless 3-phase linear motor | |
| Nominal voltage | 48 V | 48 V | 48 V | 48 V | 48 V | 48 V | |
| Peak voltage | 80 V | 80 V | 80 V | 80 V | 80 V | 80 V | |
| Nominal current, RMS | 4.4 A | 4.4 A | 4.4 A | 4.4 A | 4.4 A | 4.4 A | typ. |
| Peak current, RMS | 15 A | 15 A | 15 A | 15 A | 15 A | 15 A | typ. |
| Drive force in Z | 87.5 N | 87.5 N | 87.5 N | 87.5 N | 87.5 N | 87.5 N | typ. |
| Peak force in Z | 298 N | 298 N | 298 N | 298 N | 298 N | 298 N | |
| Force constant | 19.9 N/A | 19.9 N/A | 19.9 N/A | 19.9 N/A | 19.9 N/A | 19.9 N/A | |
| Resistance phase-phase | 3.6 Ω | 3.6 Ω | 3.6 Ω | 3.6 Ω | 3.6 Ω | 3.6 Ω | typ. |
| Inductance phase-phase | 1.2 mH | 1.2 mH | 1.2 mH | 1.2 mH | 1.2 mH | 1.2 mH | |
| Back EMF phase-phase | 16 V·s/m | 16 V·s/m | 16 V·s/m | 16 V·s/m | 16 V·s/m | 16 V·s/m | max. |
| Pole pitch N-N | 30 mm | 30 mm | 30 mm | 30 mm | 30 mm | 30 mm | |
| Mechanical properties | A-123.050B1Z | A-123.050B1ZB | A-123.100B1Z | A-123.100B1ZB | A-123.150B1Z | A-123.150B1ZB | Tolerance |
| Permissible torque in θY | 10 N·m | 10 N·m | 10 N·m | 10 N·m | 10 N·m | 10 N·m | max. |
| Maximum load capacity, vertical orientation | 10 kg | 10 kg | 10 kg | 10 kg | 10 kg | 10 kg | |
| Moved mass in Z, unloaded | 3.5 g | 3.5 g | 3.5 g | 3.5 g | 3.5 g | 3.5 g | |
| Guide | Air bearing with air preload | Air bearing with air preload | Air bearing with air preload | Air bearing with air preload | Air bearing with air preload | Air bearing with air preload | |
| Overall mass | 14000 g | 14000 g | 15500 g | 15500 g | 16500 g | 16500 g | |
| Material | Hardcoat aluminum, stainless steel mounting hardware | Hardcoat aluminum, stainless steel mounting hardware | Hardcoat aluminum, stainless steel mounting hardware | Hardcoat aluminum, stainless steel mounting hardware | Hardcoat aluminum, stainless steel mounting hardware | Hardcoat aluminum, stainless steel mounting hardware | |
| Miscellaneous | A-123.050B1Z | A-123.050B1ZB | A-123.100B1Z | A-123.100B1ZB | A-123.150B1Z | A-123.150B1ZB | Tolerance |
| Operating temperature range | 15 to 25 °C | 15 to 25 °C | 15 to 25 °C | 15 to 25 °C | 15 to 25 °C | 15 to 25 °C | |
| Connector | D-sub 9W4 (m) | D-sub 9W4 (m) | D-sub 9W4 (m) | D-sub 9W4 (m) | D-sub 9W4 (m) | D-sub 9W4 (m) | |
| Sensor connector | D-sub 15 (m) | D-sub 15 (m) | D-sub 15 (m) | D-sub 15 (m) | D-sub 15 (m) | D-sub 15 (m) | |
| Operating pressure | 515 to 585 kPa | 515 to 585 kPa | 515 to 585 kPa | 515 to 585 kPa | 515 to 585 kPa | 515 to 585 kPa | |
| Air consumption | 28 L/min | 28 L/min | 28 L/min | 28 L/min | 28 L/min | 28 L/min | max. |
| Air quality | Clean (filtered up to 1.0 µm or better) - ISO 8573–1 class 1 ǀ Oil free - ISO 8573–1 class 1 ǀ Dry (-15 °C dew point) - ISO 8573–1 class 3 | Clean (filtered up to 1.0 µm or better) - ISO 8573–1 class 1 ǀ Oil free - ISO 8573–1 class 1 ǀ Dry (-15 °C dew point) - ISO 8573–1 class 3 | Clean (filtered up to 1.0 µm or better) - ISO 8573–1 class 1 ǀ Oil free - ISO 8573–1 class 1 ǀ Dry (-15 °C dew point) - ISO 8573–1 class 3 | Clean (filtered up to 1.0 µm or better) - ISO 8573–1 class 1 ǀ Oil free - ISO 8573–1 class 1 ǀ Dry (-15 °C dew point) - ISO 8573–1 class 3 | Clean (filtered up to 1.0 µm or better) - ISO 8573–1 class 1 ǀ Oil free - ISO 8573–1 class 1 ǀ Dry (-15 °C dew point) - ISO 8573–1 class 3 | Clean (filtered up to 1.0 µm or better) - ISO 8573–1 class 1 ǀ Oil free - ISO 8573–1 class 1 ǀ Dry (-15 °C dew point) - ISO 8573–1 class 3 | |
| Recommended controllers/drivers | A-81x, A-82x | A-81x, A-82x | A-81x, A-82x | A-81x, A-82x | A-81x, A-82x | A-81x, A-82x |
Note on straightness error: 0.15 µm over 25 mm travel range
Note on straightness and angular errors: Dependent on the flatness of the surface, on which the stage is mounted.
Note on velocity and acceleration: It can be limited by payload, controller, or drive performance.
Note on the permissible push force in Z: Assumes that the payload's center of gravity is centered and no more than 50 mm above the motion platform.
Note on bidirectional repeatability and sensor resolution: Assumes a 16384x interpolation.
Note on positioning accuracy: Improved accuracy can be obtained with controller-based error compensation. The stage must be ordered with a controller from PI to achieve these values. Accuracy values assume short duration and do not consider the long-term effects of thermal drift on the stage.
Note on the operating pressure: To protect the stage against damage, it is recommended to connect an air pressure sensor to the E-Stop input of the controller.
At PI, technical data is specified at 22 ±3 °C. Unless otherwise stated, the values are for unloaded conditions. Some properties are interdependent. The designation "typ." indicates a statistical average for a property; it does not indicate a guaranteed value for every product supplied. During the final inspection of a product, only selected properties are analyzed, not all. Please note that some product characteristics may deteriorate with increasing operating time.
Downloads
Datasheet
Documentation
Documentation
User Manual A123D0001
A-123 PIglide AT3 Series Linear Air Bearing Stage, Linear Motor Driven with Encoder Feedback
Version / Date
2021-05-17
pdf - 1 MB
English
3D Models
3D Models
A-123 Z 3D Model
zip - 22 MB
Ask for a free quote on quantities required, prices, and lead times or describe your desired modification.
A-123.050B1ZB NEW!
PIglide vertical linear stage with air bearing; ironless 3-phase linear motor; 50 mm travel range; 10 kg payload; 500 mm/s maximum velocity; absolute linear encoder, 1 nm sensor resolution, BiSS-C
A-123.100B1Z NEW!
PIglide vertical linear stage with air bearing; ironless 3-phase linear motor; 100 mm travel range; 10 kg payload; 500 mm/s maximum velocity; absolute linear encoder, 1 nm sensor resolution, BiSS-C
A-123.100B1ZB NEW!
PIglide vertical linear stage with air bearing; ironless 3-phase linear motor; 100 mm travel range; 10 kg payload; 500 mm/s maximum velocity; absolute linear encoder, 1 nm sensor resolution, BiSS-C
A-123.150B1Z NEW!
PIglide vertical linear stage with air bearing; ironless 3-phase linear motor; 150 mm travel range; 10 kg payload; 500 mm/s maximum velocity; absolute linear encoder, 1 nm sensor resolution, BiSS-C
A-123.150B1ZB NEW!
PIglide vertical linear stage with air bearing; ironless 3-phase linear motor; 150 mm travel range; 10 kg payload; 500 mm/s maximum velocity; absolute linear encoder, 1 nm sensor resolution, BiSS-C
