U-521 PILine® Linear Positioning Stage

Compact stage with ultrasonic piezomotor

PI U-521
Positions small loads quickly and with precision: Velocity to 200 mm/s, minimum incremental motion to 0.3 µm
Space-saving: Only 35 mm in width and 15 mm in height
Self-locking when switched off: Saves energy and reduces generation of heat
Silent
Custom designs available on request

Precision-class linear positioning stage

PILine® stages are particularly suitable for applications that require fast precision positioning. When switched off, the self-locking drive holds the position of the stage mechanically stable. Energy consumption and heat generation are therefore considerably reduced. Applications with a low duty cycle that are battery-powered or heat-sensitive benefit from these characteristics. The position of the axis is measured by an encoder and an optical reference switch allows reliable repeatable motion. The piezomotor drive principle and its electrical operation is inexpensive and can be customized.

PILine® ultrasonic piezomotor

An integral part of a PILine® ultrasonic piezomotor is a piezo actuator that is preloaded against a movable, guided runner via a coupling element. The piezoceramic actuator is excited to ultrasonic oscillation by a high-frequency AC voltage between 100 and 200 kHz. Deformation of the actuator leads to periodic diagonal motion of the coupling element relative to the runner. The feed created is a few nanometers per cycle; the high frequencies lead to the high velocities. Preloading the piezoceramic actuator against the runner ensures self-locking of the drive when at rest and switched off.

Direct position measurement with incremental encoder

Noncontact optical encoders measure the actual position directly at the motion platform with the greatest accuracy so that nonlinearity, mechanical play or elastic deformation have no influence on position measuring.

Valid patents

US patent no. 6,765,335B2

European patent no. 1267425B1

Fields of application

Micromanipulation, automation, biotechnology, sample manipulation, sample positioning, applications with limited space, vacuum applications to 10-6 hPa (optional).


U-521.23

U-521.24

Unit

Tolerance

Motion and Positioning

Active axes

x

x

Travel range

18

18

mm

Velocity, closed-loop

200

200

mm/s

max.

Minimum incremental motion

2

0.3

µm

typ.

System resolution

0.4

0.1

µm

Bidirectional repeatability

±2

±0.2

µm

Linearity error (over the entire travel range)

8

4

µm

Pitch

±300

±300

µrad

Yaw

±300

±300

µrad


Sensor

Sensor type

Incremental encoder

Incremental encoder

Measurement principle

Optical

Optical

Measuring method

Direct measuring

Direct measuring

Sensor resolution

0.4

0.1

µm

typ.


Mechanical Load Capacity

Push force capacity

2

2

N

max.

Pull force capacity

2

2

N

max.


Drive Properties

Motor type

PILine® ultrasonic piezomotor, performance class 1

PILine® ultrasonic piezomotor, performance class 1

Drive force

2

2

N

max.

Holding torque

2

2

N

max.


Connectors

Motor/Sensor

1 × Sub-D, 15-pin (m)

1 × Sub-D, 15-pin (m)


Miscellaneous

Reference point switch

Optical

Optical

Operating temperature

0 to 40

0 to 40

°C

Material

Aluminum, anodized

Aluminum, anodized

Mass (stage without cable and connector (m))

40

40

g

Mass (stage with cable and connector (m))

160

160

g

Cable length

1.5

1.5

m

typ.

All specifications based on room temperature (22 °C ±3 °C).

Vacuum versions to 10-6 hPa available on request. Specifications for vacuum versions can differ.

Ask about custom designs!

Drawings / Images

PI U-521 Drawing

Downloads

Datasheet

pdf
pdf

PI Datasheet U-521

Compact Linear Stage Fast PILine® Direct Drive, Incremental Encoder
2016-04-08 R2
pdf - 10 MB
pdf - 10 MB

Documentation

pdf

Short Instructions MP121EK

M-66x, M-68x, U-521, U-62x, U-651 PILine® Stages
3.0.0
All
pdf - 885 KB
pdf
pdf

User Manual MP138E100

U521 Linear Positioning Stage
1.1.0
pdf - 864 KB
pdf - 893 KB

3D Models

zip

U-521 STEP

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English
zip - 1 MB