Compact Linear Stages with Piezomotor Drives

Nanopositioning Stages and Actuators with Larger Travel Ranges

Piezomotors combine the characteristics of high stiffness and position resolution typical of piezoceramic actuators with theoretically unlimited travel ranges. They can replace traditional motor-spindle combinations or direct magnetic drives used in the application. This is of particular interest when the application offers only a small installation space or requires high resolution. Depending on the task at hand, PI has developed several piezomotor technologies offering, for example, high velocities of up to 500 mm/s or high forces of up to 800 N.

Linear Actuators

PI N-470
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N-470 PiezoMike Linear Actuator

Minimum Dimensions, High Forces, Stable Positioning

  • Holding force >100 N
  • Step size 20 nm
  • Travel range 7.4 mm to 26 mm
  • Compact design
  • Feed force 22 N
  • Lifetime >1,000,000,000 steps
  • Mounting thread or shank
  • Versions with cable exit offset by 180°
PI N-470.21V
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N-470.V • N-470.U PiezoMike Linear Actuator

High Forces, Stable Positioning, Vacuum to 10-9 hPa

  • Holding force >100 N
  • Step size 20 nm
  • Travel range 7.4 mm to 26 mm
  • Compact design
  • Feed force 22 N
  • Lifetime >1,000,000,000 steps
  • Mounting thread or shank
  • Versions to 10-6 hPa and 10-9 hPa
  • Versions with cable exit, offset by 180°
PI N-472
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N-472 PiezoMike Linear Actuator

With Position Sensor for Closed-Loop Operation

  • High stability and Holding force >100 N
  • Self-locking at rest even when closed-loop control is switched off
  • Travel range 7.5 mm and 13 mm
  • Compact design with integrated incremental encoder
  • Encoder resolution to <1 nm, 50 nm minimum incremental motion
  • Feed force 22 N
  • Lifetime > 1,000,000,000 steps
  • Versions with cable exit offset by 180°
  • Nonmagnetic and vacuum-compatible functional principle
PI N-412.50
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N-412 Linear Actuator with PIShift Piezomotor

Cost-Effective and Easy to Integrate

  • Easy frontal mounting
  • Silent: Operating frequency to >20 kHz
  • Velocity over 5 mm/s
  • Sub-micron resolution
  • Holding force to 10 N
  • Low operating voltage to 48 Vpp
  • Self-locking, no heat generation at rest
PI N-422.50
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N-422 Linear Actuator with PIShift Piezomotor

Cost-Effective and Easy to Integrate

  • Simple integration: Two mounting versions
  • Quiet: Drive frequency >20 kHz
  • Velocity over 5 mm/s
  • Sub-micron resolution
  • Holding force to 10 N
Q-522 Q-Motion® Miniature Linear Stage with incremental encoder with up to 1 nm resolution (optional)
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Q-522 Q-Motion® Miniature Linear Stage

Piezomotors for Small Dimensions, High Resolution and a Favorable Price

  • Only 22 mm wide and 10 mm high
  • Direct Position Measurement with Incremental Encoder with up to 1 nm resolution (optional)
  • Up to 2 nm minimum incremental motion
  • XY mounting without adapter
  • Q-622 Rotation Stage mountable without adapter
  • Suitable for high vacuum to 10-6 hPa, ultrahigh vacuum variants for 10-9 hPa are also available
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Q-521 Q-Motion® Miniature Linear Stage

Smallest linear stage with position control, high resolution and attractive price

  • Only 21 mm wide and 10 mm high
  • Direct position measurement with integrated incremental encoder, up to 1 nm resolution (optional)
  • Up to 1 nm encoder resolution
  • Up to 2 nm minimum incremental motion
  • Set-up of multi-axis systems with adapter plate or bracket (optionally available)
  • Velocity 10 mm/s
  • Suitable for vacuum to 10-6 hPa, versions to 10-9 hPa available
PI Q-545.240
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Q-545 Q-Motion® Precision Linear Stage

High Forces and Small Size Through Piezomotors

  • Only 45 mm wide
  • Push force 8 N
  • Incremental sensors with position resolution 1 nm (optional)
  • XY combinations without adapter plate possible
  • Velocity 10 mm/s
  • Vacuum-compatible to 10-6 hPa (Q-545.xx0)
  • Vacuum-compatible to 10-9 hPa (Q-545.xxU)
PI U-521
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U-521 PILine® Linear Positioning Stage

Compact stage with ultrasonic piezomotor

  • Positions small loads quickly and with precision: Velocity to 200 mm/s, minimum incremental motion to 0.3 µm
  • Space-saving: Only 35 mm in width and 15 mm in height
  • Self-locking when switched off: Saves energy and reduces generation of heat
  • Silent
  • Custom designs available on request

Compact Linear Stages

Q-522 Q-Motion® Miniature Linear Stage with incremental encoder with up to 1 nm resolution (optional)
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Q-522 Q-Motion® Miniature Linear Stage

Piezomotors for Small Dimensions, High Resolution and a Favorable Price

  • Only 22 mm wide and 10 mm high
  • Direct Position Measurement with Incremental Encoder with up to 1 nm resolution (optional)
  • Up to 2 nm minimum incremental motion
  • XY mounting without adapter
  • Q-622 Rotation Stage mountable without adapter
  • Suitable for high vacuum to 10-6 hPa, ultrahigh vacuum variants for 10-9 hPa are also available
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Q-521 Q-Motion® Miniature Linear Stage

Smallest linear stage with position control, high resolution and attractive price

  • Only 21 mm wide and 10 mm high
  • Direct position measurement with integrated incremental encoder, up to 1 nm resolution (optional)
  • Up to 1 nm encoder resolution
  • Up to 2 nm minimum incremental motion
  • Set-up of multi-axis systems with adapter plate or bracket (optionally available)
  • Velocity 10 mm/s
  • Suitable for vacuum to 10-6 hPa, versions to 10-9 hPa available
PI Q-545.240
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Q-545 Q-Motion® Precision Linear Stage

High Forces and Small Size Through Piezomotors

  • Only 45 mm wide
  • Push force 8 N
  • Incremental sensors with position resolution 1 nm (optional)
  • XY combinations without adapter plate possible
  • Velocity 10 mm/s
  • Vacuum-compatible to 10-6 hPa (Q-545.xx0)
  • Vacuum-compatible to 10-9 hPa (Q-545.xxU)
PI U-521
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U-521 PILine® Linear Positioning Stage

Compact stage with ultrasonic piezomotor

  • Positions small loads quickly and with precision: Velocity to 200 mm/s, minimum incremental motion to 0.3 µm
  • Space-saving: Only 35 mm in width and 15 mm in height
  • Self-locking when switched off: Saves energy and reduces generation of heat
  • Silent
  • Custom designs available on request