LMS-270 Precision Linear Stage
High Dynamics due to the Magnetic Direct Drive, High Stability
- Travel ranges to 1000 mm
- Velocity to 800 mm/s
- Incremental encoder with 15 nm resolution
- 480 N peak force
Reference-class linear stage
High travel accuracy. Inductive limit switches. High position resolution due to incremental encoder with analog signal transmission (sin/cos, 1 Vpp).
Multi-axis combinations with the directly driven rotation stages of the UPR series.
Versions with DC servo motors or stepper motors are available with the same footprint.
Magnetic direct drive
Ironless magnetic direct drive for high velocity and acceleration. High position resolution.
Application fields
Industry and research. Metrology, precision scanning in in semiconductor or electronics manufacturing.
Specifications
Specifications
LMS-270KSHO | LMS-270KMED | LMS-270KLON | LMS-270KMAX | Unit | Tolerance | |
---|---|---|---|---|---|---|
Motion and positioning | ||||||
Active axes | X | X | X | X | ||
Travel range | 300 | 500 | 800 | 1000 | mm | |
Integrated sensor | Incremental encoder | Incremental encoder | Incremental encoder | Incremental encoder | ||
Sensor resolution (1) | 15 | 15 | 15 | 15 | nm | |
Minimum incremental motion | 0.05 | 0.05 | 0.05 | 0.05 | µm | typ. |
Unidirectional repeatability | 0.075 | 0.075 | 0.075 | 0.075 | µm | typ. |
Bidirectional repeatability | ±0.15 | ±0.15 | ±0.15 | ±0.15 | µm | typ. |
Pitch | ±40 | ±80 | ±100 | ±120 | µrad | typ. |
Yaw | ±20 | ±30 | ±40 | ±50 | µrad | typ. |
Straightness | ±3 | ±4 | ±7 | ±10 | µm | typ. |
Flatness | ±3 | ±4 | ±7 | ±10 | µm | typ. |
Velocity | 800 | 800 | 800 | 800 | mm/s | max. |
Mechanical properties | ||||||
Load capacity in z | 500 | 500 | 500 | 500 | N | max. |
Load capacity in y | 500 | 500 | 500 | 500 | N | max. |
Moved mass | 2.5 | 2.5 | 2.5 | 2.5 | kg | |
Overall mass | 35 | 40 | 51 | 61 | kg | |
Linear guiding | Recirculating ball bearings | Recirculating ball bearings | Recirculating ball bearings | Recirculating ball bearings | ||
Drive properties | ||||||
Drive type | Linear motor, ironless | Linear motor, ironless | Linear motor, ironless | Linear motor, ironless | ||
Intermediate circuit voltage | 48 | 48 | 48 | 48 | V DC | max. |
Peak force | 480 | 480 | 480 | 480 | N | typ. |
Nominal force | 100 | 100 | 100 | 100 | N | typ. |
Peak current, effective | 17.5 | 17.5 | 17.5 | 17.5 | A | typ. |
Nominal current, effective | 3.7 | 3.7 | 3.7 | 3.7 | A | typ. |
Force constant, effective | 27.5 | 27.5 | 27.5 | 27.5 | N/A | typ. |
Resistance per phase | 1.28 | 1.28 | 1.28 | 1.28 | Ω | typ. |
Inductivity per phase | 1 | 1 | 1 | 1 | mH | typ. |
Back EMF phase-phase | 22.5 | 22.5 | 22.5 | 22.5 | Vs/m | max. |
Miscellaneous | ||||||
Operating temperature range | 10 to 50 | °C | ||||
Humidity | 20 – 90% rel., not condensing | 20 – 90% rel., not condensing | 20 – 90% rel., not condensing | 20 – 90% rel., not condensing | ||
Material | Aluminum, black anodized | Aluminum, black anodized | Aluminum, black anodized | Aluminum, black anodized | ||
Recommended controller | SMC Hydra, ACS SPii+EC and other industrial solutions | SMC Hydra, ACS SPii+EC and other industrial solutions | SMC Hydra, ACS SPii+EC and other industrial solutions | SMC Hydra, ACS SPii+EC and other industrial solutions |
(1) With SMC Hydra controller.
Downloads
Datasheet
Documentation
User Manual LMS270UM0001
Quote / Order
Ask for a free quote on quantities required, prices, and lead times or describe your desired modification. All products available online can be ordered directly.