Multi-Axis Piezo Flexure Stages

PI’s multi-axis piezo flexure stages allow positioning and scanning with sub-nanometer precision in up to 6 axes, including tip, tilt and yaw motion. Versions range from most compact cube design to large aperture and low profile.

XYZ Scanners are all-rounders in positioning technology. Applications include sample adjustment, technology, optical metrology, fiber positioning and photonics, as well as atomic force microscopy.

All piezo nanopositioning systems are factory-calibrated and delivered with measurement log. 

XYZ Compact Piezo Cubes

P-616 NanoCube® Nanopositioner

P-611.3 NanoCube® XYZ Piezo System

P-363 PicoCube XY(Z) Piezo Scanner

P-313 PicoCube XY(Z) Piezo Scanner

PI P-915KPPS

P-915KPPS XY-Theta-Z Piezo Stage


XYZ Piezo Stages with Aperture

P-733.3 XYZ Piezo Nanopositioner

P-561 • P-562 • P-563 PIMars Nanopositioning Stage

P-517 • P-527 Multi-Axis Piezo Scanner


Z / Tip / Tilt Piezo Flexure Stages

P-541.2 • P-542.2 XY Piezo Stage

P-541.Z • P-541.T Piezo Z Stages / Z and Tip/Tilt Stages

P-518 • P-528 • P-558 Piezo Z/Tip/Tilt Stage


6- Axis Piezo Stages

P-587 6-Axis Precision Piezo Stage

P-562.6CD PIMars 6-Axis Nanopositioning Stage