P-541.T0L
Nanopositioner Z and tip/tilt stage with large aperture, 150 µm / 1.2 mrad, without sensor
P-541.Z • P-541.T Piezo Z Stages / Z and Tip/Tilt Stages
Low Profile, Large Aperture
- Low profile for easy integration: 16.5 mm
- Clear aperture 80 mm × 80 mm
- Travel range to 150 µm
- Tip/tilt angle to 1.2 mrad
- Parallel kinematics for faster response times and higher multi-axis accuracy
- Sensor technology: Inexpensive strain gauge sensors or capacitive sensors for higher performance
- Outstanding lifetime due to PICMA® piezo actuators
- Combination with microscope stages possible for long travel ranges
P-541.Z / P-541.T, dimensions in mm. Note that a comma is used in the drawings instead of a decimal point.
P-541.Z • P-541.T Piezo Z Stages / Z and Tip/Tilt Stages
Product Description
Specifications
Downloads
Quote / Order
Application fields
- Scanning microscopy
- Super-resolution microscopy
- Biotechnology
- Mask/wafer positioning
- Sample positioning
- Interferometry
- Metrology
Outstanding lifetime thanks to PICMA® piezo actuators
The patented PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.
Subnanometer resolution with capacitive sensors
Capacitive sensors measure with subnanometer resolution without contacting. They guarantee excellent linearity of motion, long-term stability, and a bandwidth in the kHz range.
High guiding accuracy due to zero-play flexure guides
Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They work in a wide temperature range.
Automatic configuration and fast component exchange
Mechanics and controllers can be combined as required and exchanged quickly. All servo and linearization parameters are stored in the ID chip of the D-sub connector of the mechanics. The autocalibration function of the digital controllers uses this data each time the controller is switched on.
High dynamics multi-axis operation due to parallel kinematics
In a parallel-kinematic multi-axis system, all actuators act on a common platform. The minimum mass inertia and the identical design of all axes allow fast, dynamic, and nevertheless precision motion.
Specifications
Specifications
Click inside the table and use your arrow keys to scroll left or right.
| Motion | P-541.T0L | P-541.TCD | P-541.TSL | P-541.Z0L | P-541.ZCD | P-541.ZSL | Tolerance |
|---|---|---|---|---|---|---|---|
| Active axes | Z, θX, θY | Z, θX, θY | Z, θX, θY | Z | Z | Z | |
| Travel range in Z, open loop | 150 µm | 150 µm | 150 µm | 150 µm | 150 µm | 150 µm | ±20 % |
| Rotation range in θX, open loop | 1.2 mrad | 1.2 mrad | 1.2 mrad | ±20 % | |||
| Rotation range in θY, open loop | 1.2 mrad | 1.2 mrad | 1.2 mrad | ±20 % | |||
| Yaw (Rotational crosstalk in θX with motion in Z) | ± 15 µrad | ± 15 µrad | ± 15 µrad | ± 15 µrad | ± 15 µrad | ± 15 µrad | typ. |
| Pitch (Rotational crosstalk in θY with motion in Z) | ± 15 µrad | ± 15 µrad | ± 15 µrad | ± 15 µrad | ± 15 µrad | ± 15 µrad | typ. |
| Travel range in Z | 100 µm | 100 µm | 100 µm | 100 µm | |||
| Rotation range in θX | 0.8 mrad | 0.8 mrad | |||||
| Rotation range in θY | 0.8 mrad | 0.8 mrad | |||||
| Linearity error in Z | 0.03 % | 0.2 % | 0.03 % | 0.2 % | typ. | ||
| Linearity error in θX | 0.03 % | 0.2 % | typ. | ||||
| Linearity error in θY | 0.03 % | 0.2 % | typ. | ||||
| Positioning | P-541.T0L | P-541.TCD | P-541.TSL | P-541.Z0L | P-541.ZCD | P-541.ZSL | Tolerance |
| Resolution in Z, open loop | 0.2 nm | 0.2 nm | 0.2 nm | 0.2 nm | 0.2 nm | 0.2 nm | typ. |
| Resolution in θX, open loop | 0.02 µrad | 0.02 µrad | 0.02 µrad | typ. | |||
| Resolution in θY, open loop | 0.02 µrad | 0.02 µrad | 0.02 µrad | typ. | |||
| Integrated sensor | Capacitive, direct position measuring | SGS, direct position measuring | Capacitive, direct position measuring | SGS, indirect position measuring | |||
| System resolution in Z | 0.5 nm | 2.5 nm | 0.5 nm | 2.5 nm | |||
| System resolution in θX | 0.08 µrad | 0.25 µrad | |||||
| System resolution in θY | 0.08 µrad | 0.25 µrad | |||||
| Point repeatabilitiy in Z, 10% step, 1 sigma | 2 nm | 10 nm | 2 nm | 10 nm | |||
| Point repeatabilitiy in θX, 10% step, 1 sigma | 0.01 µrad | 0.05 µrad | |||||
| Point repeatabilitiy in θY, 10% step, 1 sigma | 0.01 µrad | 0.05 µrad | |||||
| Drive Properties | P-541.T0L | P-541.TCD | P-541.TSL | P-541.Z0L | P-541.ZCD | P-541.ZSL | Tolerance |
| Drive type | PICMA® | PICMA® | PICMA® | PICMA® | PICMA® | PICMA® | |
| Electrical capacitance in Z | 6.3 µF | 6.3 µF | 6.3 µF | 6.3 µF | 6.3 µF | 6.3 µF | ±20 % |
| Electrical capacitance in θX | 6.3 µF | 6.3 µF | 6.3 µF | ±20 % | |||
| Electrical capacitance in θY | 6.3 µF | 6.3 µF | 6.3 µF | ±20 % | |||
| Mechanical Properties | P-541.T0L | P-541.TCD | P-541.TSL | P-541.Z0L | P-541.ZCD | P-541.ZSL | Tolerance |
| Guide | Flexure guide with lever amplification | Flexure guide with lever amplification | Flexure guide with lever amplification | Flexure guide with lever amplification | Flexure guide with lever amplification | Flexure guide with lever amplification | |
| Stiffness in Z | 0.8 N/µm | 0.8 N/µm | 0.8 N/µm | 0.8 N/µm | 0.8 N/µm | 0.8 N/µm | ±20 % |
| Resonant frequency in Z, under load with 200 g | 250 Hz | 250 Hz | 250 Hz | 250 Hz | 250 Hz | 250 Hz | ±20 % |
| Resonant frequency in Z, unloaded | 410 Hz | 410 Hz | 410 Hz | 410 Hz | 410 Hz | 410 Hz | ±20 % |
| Resonant frequency in θX, under load with 200 g | 270 Hz | 270 Hz | 270 Hz | ±20 % | |||
| Resonant frequency in θX, unloaded | 330 Hz | 330 Hz | 330 Hz | ±20 % | |||
| Resonant frequency in θY, under load with 200 g | 270 Hz | 270 Hz | 270 Hz | ±20 % | |||
| Resonant frequency in θY, unloaded | 330 Hz | 330 Hz | 330 Hz | ±20 % | |||
| Permissible push force in Z | 50 N | 50 N | 50 N | 50 N | 50 N | 50 N | max. |
| Permissible pull force in Z | 20 N | 20 N | 20 N | 20 N | 20 N | 20 N | max. |
| Overall mass | 700 g | 750 g | 730 g | 700 g | 750 g | 730 g | ±5 % |
| Material | Aluminum | Aluminum | Aluminum | Aluminum | Aluminum | Aluminum | |
| Miscellaneous | P-541.T0L | P-541.TCD | P-541.TSL | P-541.Z0L | P-541.ZCD | P-541.ZSL | Tolerance |
| Connector | LEMO LVPZT | D-sub 25W3 (m) | LEMO LVPZT | LEMO LVPZT | D-sub 7W2 (m) | LEMO LVPZT | |
| Recommended controllers / drivers | E-503, E-505 | E-503, E-505, E-712, E-727 | E-503, E-505, E-712, E-727 | E-503, E-505 | E-503, E-505, E-709 | E-503, E-505, E-709 | |
| Cable length | 1.5 m | 1.5 m | 1.5 m | 1.5 m | 1.5 m | 1.5 m | ±10 mm |
| Operating temperature range | -20 to 80 °C | -20 to 80 °C | -20 to 80 °C | -20 to 80 °C | -20 to 80 °C | -20 to 80 °C | |
| Sensor connector | LEMO for strain gauge sensors | LEMO for strain gauge sensors |
P-541.Txx: Parallel kinematics design; the maximum displacement for translation motion and tip/tilt motion cannot be achieved simultaneously.
The resolution of the system is limited only by the noise of the amplifier and the measuring technology because PI piezo nanopositioning systems are free of friction.
All specifications based on room temperature (22 °C ±3 °C).
Downloads
Datasheet
Documentation
Documentation
User Manual PZ244
P-541/P-542 Nanopositioners
Version / Date
1.2.0 2020-07-27
pdf - 1 MB
Version / Date
1.2.0 2020-07-27
pdf - 1 MB
3-D Models
3-D Models
P-541.Z 3-D model
zip - 704 KB
Brochure
Brochure
Microscope Stage Configurator
Sample Stages and Holders for Inverted Microscopes
Version / Date
BRO70E R3D
pdf - 4 MB
English
Ask for a free quote on quantities required, prices, and lead times or describe your desired modification. All products available online can be ordered directly.
P-541.TCD
Nanopositioner Z and tip/tilt stage with large aperture, 100 µm / 0.8 mrad, direct position measuring, capacitive sensors
P-541.TSL
Nanopositioner Z and tip/tilt stage with large aperture, 100 µm / 0.8 mrad, strain gauge sensors
P-541.Z0L
Vertical nanopositioning stage with large aperture, 150 µm, without sensor
P-541.ZCD
Vertical nanopositioning stage with large aperture, 100 µm, direct position measuring, capacitive sensors
P-541.ZSL
Vertical nanopositioning stage with large aperture, 100 µm, strain gauge sensors
Ask an engineer!
Quickly receive an answer to your question by email or phone from a local PI sales engineer.
Compatible Electronics
Compatible Accessories
Related Products
Technology
PICMA® Technology
Highly reliable and extended lifetime through the patented manufacturing process for multilayer actuators.
Flexure Guiding Systems
Flexure guides from PI have proven their worth in nanopositioning. They guide the piezo actuator and ensure a straight motion without tilting or lateral offset.
Digital Motion Controllers
Digital technology opens up possibilities for improving performance in control engineering which do not exist with conventional analog technology.
Capacitive Sensors
Capacitive sensors are the metrology system of choice for the most demanding nanopositioning applications.
Parallel Kinematics
In a parallel-kinematic, multi-axis system, all actuators act directly on a single moving platform.