P-587 6-Axis Precision Piezo Stage

Long Scanning Range, Direct Position Measurement

PI P-587
For scanning and positioning in X, Y, Z, θX, θY, θZ
800 µm × 800 µm × 200 µm linear range
Up to 1 mrad rotational angle
Enhanced responsiveness & multi-axis precision: Parallel kinematics / metrology
Direct metrology with capacitive sensors for highest linearity
Outstanding lifetime due to PICMA® piezo actuators
Frictionless, high-precision flexure guiding system
Active trajectory control in all 6 degrees of freedom

Specifications

This content is only available on tablets or desktop devices.

Drawings / Images

Downloads

Datasheet

pdf
pdf

PI Datasheet P-587

6-Axis Precision Piezo Stage Long Scanning Range, Direct Position Measurement
pdf - 709 KB
pdf - 708 KB

Documentation

pdf
pdf

User Manual PZ251

P-587.6CD 6-Axis Nanopositioning System with Capacitive Sensors
1.0.0
pdf - 720 KB
pdf - 740 KB