L-611 V6 • V7 • V9 Precision Rotation Stage Suitable for Vacuum

Active axes

θ_Z

Rotation range

>360

°

Wobble

±15

µrad

Typ.

Flatness

±1

µm

Typ.

Eccentricity

±2.5

µm

Typ.

Angular velocity

20

°/s

Max.

Integrated sensor

–

–

–

Design resolution

349

349

349

µrad

Minimum incremental motion

8.72

8.72

8.72

µrad

Typ.

Unidirectional repeatability

20

20

20

µrad

Typ.

Bidirectional repeatability

±175

±175

±175

µrad

Typ.

Reference switch

Hall effect, N/C contact, 5V, NPN

Mechanical, N/C contact, 5V, NPN

Mechanical, N/C contact, 5V, NPN

Bearing

Ball bearings

Worm gear ratio

90:1

Load capacity / axial force

100

N

Max.

Permissible lateral force

50

N

Max.

Permissible torque M_X in θ_X

40

Nm

Max.

Permissible torque M_Y in θ_Y

40

Nm

Max.

Permissible torque M_z in θ_Z

3

Nm

Max.

Moment of inertia

770

kg·mm²

±20 %

Motor type

2-phase stepper motor

Operating voltage, nominal

24

V

Nom.

Operating voltage, max.

48

V

Max.

Motor resolution

200

Full steps/rev.

Operating temperature range

5 to 40

5 to 40

5 to 40

°C

Material

Aluminum, anodized, stainless steel, red bronze

Aluminum, stainless steel, red bronze

Aluminum, stainless steel, red bronze

Mass

2.6

2.6

2.6

kg

±5 %

Moved mass

1.1

1.1

1.1

kg

±5 %

Fixed cable*, on the vacuum side: Cable length

–

2

2

m

Connector

HD D-sub 26 (m)

D-sub 15 (f)

D-sub 15 (f)

Recommended controllers/drivers

C-663.12 (single axis)

SMC Hydra (double axis)

C-885 with C-663.12C885 (up to 20 axes)

ACS modular controller

C-663.12 (single axis)

SMC Hydra (double axis)

C-885 with C-663.12C885 (up to 20 axes)

ACS modular controller

C-663.12 (single axis)

SMC Hydra (double axis)

C-885 with C-663.12C885 (up to 20 axes)

ACS modular controller