L-611 V6 • V7 • V9 Precision Rotation Stage Suitable for Vacuum
High Travel Accuracy
- Suitable for vacuum up to 10-9 hPa
- Unlimited travel range
- Very high resolution
- Stepper motor
- Direction-sensing reference switch
- Multi-axis setups possible
Reference-class rotation stage
High-precision positioning due to low-play preloaded worm gear. Preloaded pivot bearings for high travel accuracy. Clear aperture with Ø 35 mm. Unlimited travel range in both directions of rotation. Reference switch.
Reduced outgassing especially for use in vacuum environments
Most notably, for the lubrication of the guides and the drive screw a material with particularly low outgassing is used. Therefore, a bakeout temperature of up to 80 °C can be reached. With this and other modifications of the PI V6 vacuum class, this positioner can be used up to 10-6 hPa.
Higher quality for high vacuum applications
In this case, special components suitable for high vacuum are used, such as motor, measuring system, and limit switches. In addition, the surface is made of uncoated aluminum, the drive screw and guides are made of stainless steel. With this, the PI V7 vacuum class is reached, which means up to 10-7 hPa.
The highest quality for special requirements in ultrahigh vacuum
In this vacuum class, the product is optimized in all details and thanks to components suitable for ultrahigh vacuum, in order to reach PI V9 vacuum class up to 10-9 hPa. Among other things, only selected types of plastic are used for this purpose and bakeout temperatures of 120 °C with measuring system, respectively 150 °C without measuring system are applied.
Option: Measurement of the travel accuracy and positioning accuracy
Individual measurement logs available on request for wobble, axial, and radial creep. Please specify when ordering.
Application fields
Vacuum chambers. Research. Beamline instrumentation. Microscopy. Electronics assembly and inspection.
Specifications
Specifications
Positioning | L-611.991200V6 | L-611.991300V7 | L-611.991600V9 | Unit | Tolerance |
---|---|---|---|---|---|
Integrated sensor | – | – | – | ||
Design resolution | 349 | 349 | 349 | µrad | |
Minimum incremental motion | 8.72 | 8.72 | 8.72 | µrad | Typ. |
Unidirectional repeatability | 20 | 20 | 20 | µrad | Typ. |
Bidirectional repeatability | ±175 | ±175 | ±175 | µrad | Typ. |
Reference switch | Hall effect, N/C contact, 5V, NPN | Mechanical, N/C contact, 5V, NPN | Mechanical, N/C contact, 5V, NPN |
Miscellaneous | L-611.991200V6 | L-611.991300V7 | L-611.991600V9 | Unit | Tolerance |
---|---|---|---|---|---|
Operating temperature range | 5 to 40 | 5 to 40 | 5 to 40 | °C | |
Material | Aluminum, anodized, stainless steel, red bronze | Aluminum, stainless steel, red bronze | Aluminum, stainless steel, red bronze | ||
Mass | 2.6 | 2.6 | 2.6 | kg | ±5 % |
Moved mass | 1.1 | 1.1 | 1.1 | kg | ±5 % |
Fixed cable*, on the vacuum side: Cable length | – | 2 | 2 | m | |
Connector | HD D-sub 26 (m) | D-sub 15 (f) | D-sub 15 (f) | ||
Recommended controllers/drivers | C-663.12 (single axis) SMC Hydra (double axis) C-885 with C-663.12C885 (up to 20 axes) ACS modular controller | C-663.12 (single axis) SMC Hydra (double axis) C-885 with C-663.12C885 (up to 20 axes) ACS modular controller | C-663.12 (single axis) SMC Hydra (double axis) C-885 with C-663.12C885 (up to 20 axes) ACS modular controller |
Downloads
Datasheet
Documentation
User Manual L611T0006
L-611 Precision rotation stage for vacuum applications (1 E-7 hPa)
User Manual L611T0011
L-611 Precision rotation stage for vacuum applications (1 E-6 hPa), with stepper drive
User Manual L611T0007
L-611 Precision rotation stage for vacuum applications (1 E-9 hPa)
3-D Models
3-D model L-611.991661V91
3-D model L-611.991600V9
3-D model L-611.991300V71
3-D model L-611.9912xxV6
Quote / Order
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