L-611.991200V6
Vacuum-compatible precision rotation stage; 2-phase stepper motor; 360 ° rotational angle; 100 N load capacity; 20 °/s maximum angular velocity; vacuum compatible to 10⁻⁶ hPa
L-611 V6 • V7 • V9 Precision Rotation Stage Suitable for Vacuum
High Travel Accuracy
- Vacuum compatible up to 10-9 hPa
- Unlimited travel range
- Very high resolution
- Stepper motor
- Direction-sensing reference switch
- Multi-axis setups possible
L-611 rotation stage with 2-phase stepper motor
Direction of the axes and torques for rotation stages
L-611.991200V6, dimensions in mm. Note that a comma is used in the drawings instead of a decimal point.
L-611.991300V7, dimensions in mm. Note that a comma is used in the drawings instead of a decimal point.
L-611.991600V9, dimensions in mm. Note that a comma is used in the drawings instead of a decimal point.
L-611 V6 • V7 • V9 Precision Rotation Stage Suitable for Vacuum
Product Description
Specifications
Downloads
Quote / Order
Reference-class rotation stage
High-precision positioning due to low-play preloaded worm gear. Preloaded pivot bearings for high travel accuracy. Clear aperture with 35 mm Ø. Unlimited travel range in both directions of rotation. Reference switch.
Reduced outgassing especially for use in vacuum environments
Most notably, for the lubrication of the guides and the spindle a material with particularly low outgassing is used. This allows a bakeout temperature of up to 80° C. With this and other modifications of the PI V6 vacuum class, this positioner can be used up to 10-6hPa.
Higher quality for applications in high vacuum
In this case, special components suitable for high vacuum are used, such as motor, measuring system, and limit switches. In addition, the surface is made of uncoated aluminum and the spindles and guides are made of stainless steel. With this, the PI V7 vacuum class is reached, which means up to 10-7 hPa.
The highest quality for special requirements in ultrahigh vacuum
In this vacuum class, the product is optimized in all details thanks to components suitable for ultrahigh vacuum in order to reach PI V9 vacuum class up to 10-9hPa. Among other things, only selected types of plastic are used for this purpose and bakeout temperatures of 120 °C with measuring system, respectively 150 °C without measuring system are applied.
Option: Measurement of the travel accuracy and positioning accuracy
Individual measurement logs available on request for wobble, axial, and radial creep. Please specify when ordering.
Application fields
Vacuum chambers. Research. Beamline instrumentation. Microscopy. Electronics assembly and inspection.
Specifications
Specifications
| Motion | L-611.991200V6 | L-611.991300V7 | L-611.991600V9 | Tolerance |
|---|---|---|---|---|
| Active axes | θZ | θZ | θZ | |
| Rotation range in θZ | 360 ° | 360 ° | 360 ° | |
| Maximum angular velocity in θZ, unloaded | 20 °/s | 20 °/s | 20 °/s | |
| Radial error in X | ± 2.5 µm | ± 2.5 µm | ± 2.5 µm | typ. |
| Axial error | ± 1 µm | ± 1 µm | ± 1 µm | typ. |
| Tilt error around X (wobble) | ± 15 µrad | ± 15 µrad | ± 15 µrad | typ. |
| Positioning | L-611.991200V6 | L-611.991300V7 | L-611.991600V9 | Tolerance |
| Minimum incremental motion in θZ | 8.72 µrad | 8.72 µrad | 8.72 µrad | typ. |
| Unidirectional repeatability in θZ | ± 10 µrad | ± 10 µrad | ± 10 µrad | typ. |
| Bidirectional repeatability in θZ | 350 µrad | 350 µrad | 350 µrad | typ. |
| Reference switch | Hall effect, N/C contact, 5 V, NPN | Hall effect, N/C contact, 5 V, NPN | Hall effect, N/C contact, 5 V, NPN | |
| Drive Properties | L-611.991200V6 | L-611.991300V7 | L-611.991600V9 | Tolerance |
| Drive type | 2-phase stepper motor | 2-phase stepper motor | 2-phase stepper motor | |
| Operating voltage | 24 V | 24 V | 24 V | |
| Nominal voltage | 24 V | 24 V | 24 V | |
| Nominal current, RMS | 1.2 A | 1.2 A | 1.2 A | typ. |
| Maximum power consumption | 10 W | 10 W | 10 W | |
| Motor resolution | 200 Full steps/rev. | 200 Full steps/rev. | 200 Full steps/rev. | |
| Resistance phase-phase | 3.3 Ω | 3.3 Ω | 3.3 Ω | typ. |
| Inductance phase-phase | 2.8 mH | 2.8 mH | 2.8 mH | |
| Mechanical Properties | L-611.991200V6 | L-611.991300V7 | L-611.991600V9 | Tolerance |
| Permissible push force in X | 50 N | 50 N | 50 N | max. |
| Permissible push force in Y | 50 N | 50 N | 50 N | max. |
| Permissible push force in Z | 100 N | 100 N | 100 N | max. |
| Permissible pull force in X | 50 N | 50 N | 50 N | max. |
| Permissible pull force in Y | 50 N | 50 N | 50 N | max. |
| Permissible pull force in Z | 100 N | 100 N | 100 N | max. |
| Permissible torque in θX | 40 N·m | 40 N·m | 40 N·m | max. |
| Permissible torque in θY | 40 N·m | 40 N·m | 40 N·m | max. |
| Permissible torque in θZ | 3 N·m | 3 N·m | 3 N·m | max. |
| Moment of inertia in θZ, unloaded | 770 kg·mm² | 770 kg·mm² | 770 kg·mm² | ±20 % |
| Moved mass in θZ, unloaded | 1100 g | 1100 g | 1100 g | |
| Worm gear reduction | 90 : 1 | 90 : 1 | 90 : 1 | |
| Bearing type | Ball bearings | Ball bearings | Ball bearings | |
| Overall mass | 2600 g | 2600 g | 2600 g | |
| Material | Aluminum, anodized; stainless steel; red bronze | Aluminum, anodized; stainless steel; red bronze | Aluminum, anodized; stainless steel; red bronze | |
| Miscellaneous | L-611.991200V6 | L-611.991300V7 | L-611.991600V9 | Tolerance |
| Operating temperature range | 5 to 40 °C | 5 to 40 °C | 5 to 40 °C | |
| Vacuum class | 10⁻⁶ ǀ hPa | 10⁻⁷ ǀ hPa | 10⁻⁹ ǀ hPa | |
| Connector | HD D-sub 26 (m) | D-sub 15 (f) | D-sub 15 (f) | |
| Cable length | — | 2 m | 2 m | |
| Recommended controllers/drivers | C-663.12 C-885 with C-663.12C885 ACS modular controller | C-663.12 C-885 with C-663.12C885 ACS modular controller | C-663.12 C-885 with C-663.12C885 ACS modular controller |
Note on cable length: Fixed cable, firmly attached to the product
At PI, technical data is specified at 22 ±3 °C. Unless otherwise stated, the values are for unloaded conditions. Some properties are interdependent. The designation "typ." indicates a statistical average for a property; it does not indicate a guaranteed value for every product supplied. During the final inspection of a product, only selected properties are analyzed, not all. Please note that some product characteristics may deteriorate with increasing operating time.
Downloads
Datasheet
Documentation
Documentation
User Manual L611T0006
L-611 Precision rotation stage for vacuum applications (1 E-7 hPa)
Version / Date
2020-06-29
pdf - 303 KB
English
Documentation
User Manual L611T0011
L-611 Precision rotation stage for vacuum applications (1 E-6 hPa), with stepper drive
Version / Date
2020-06-29
pdf - 410 KB
English
Documentation
User Manual L611T0007
L-611 Precision rotation stage for vacuum applications (1 E-9 hPa)
Version / Date
2020-06-26
pdf - 392 KB
English
3D Models
3D Models
L-611.991xxxVx 3D Model
Version / Date
2023-03-30
zip - 10 MB
Ask for a free quote on quantities required, prices, and lead times or describe your desired modification.
L-611.991300V7
Vacuum-compatible precision rotation stage; 2-phase stepper motor; 360 ° rotational angle; 100 N load capacity; 20 °/s maximum angular velocity; vacuum compatible to 10⁻⁷ hPa; 2 m cable length
L-611.991600V9
Vacuum-compatible precision rotation stage; 2-phase stepper motor; 360 ° rotational angle; 100 N load capacity; 20 °/s maximum angular velocity; vacuum compatible to 10⁻⁹ hPa; 2 m cable length
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