P-363 PicoCube XY(Z) Piezo Scanner

High-Dynamics Nanoscanner for Scanning Probe Microscopy

PI P-363
Ultra-high-performance closed-loop scanner for AFM / SPM
Compact manipulation tool for bio- / nanotechnology
Resonant frequency 9.8 kHz
Capacitive sensors for highest accuracy
Parallel-motion metrology for automated compensation of guiding errors
Resolution 50 picometer
Travel range 5 µm × 5 µm × 5 µm
Vacuum-compatible versions

Specifications

pdf
pdf

Datasheet P-363

2015-01-30
2015-01-30
pdf - 860 KB
pdf - 858 KB

Drawings / Images

P-363.3Cx, dimensions in mm. Removable top plate.
P-363.2Cx, dimensions in mm. Removable top plate.
PI P-363 Diagram, The P-363 settles to within 1 nm in 1 ms (100 nm step, X and Y motion; faster response in Z)
PI P-363 Diagram, 300 picometer steps (0.3 nm) performed with the P-363, measured with an external high-resolution, capacitive measurement system

Downloads

Datasheet

pdf
pdf

Datasheet P-363

2015-01-30
2015-01-30
pdf - 860 KB
pdf - 858 KB

3-D Models

zip

P-363 STEP

English
zip - 318 KB