P-915KLVS Vacuum Compatible XYZ Piezo Scanner

Large Clear Aperture, High-Dynamics, High-Load Nanopositioner

Vacuum-compatible to 10-6 hPa
Direct metrology with capacitive sensors
Excellent straightness: <0.1 µrad runout
Frictionless, high-precision flexure guiding system

Specifications

pdf
pdf

PI Datasheet P-915KLVS

Vacuum Compatible XYZ Piezo Scanner Large Clear Aperture, High-Dynamics, High-Load Nanopositioner
pdf - 639 KB
pdf - 642 KB

Ordering Information

This product is currently not in our price list.

It is an example of what is feasible with our technology. We would like to work with you on a solution that fits your needs.
P-915KLVS
XYZ Nanopositioning System with Large Clear Aperture, 100 µm × 100 µm × 100 µm, Direct Metrology, Capacitive Sensors, Vacuum-Compatible to 10-6 hPa

Downloads

Datasheet

pdf
pdf

PI Datasheet P-915KLVS

Vacuum Compatible XYZ Piezo Scanner Large Clear Aperture, High-Dynamics, High-Load Nanopositioner
pdf - 639 KB
pdf - 642 KB