N-510KAWP High-Force NEXLINE® Z / Tip / Tilt Platform

Nanometer Precision for Semiconductor Industry, Wafer Alignment

Self-locking, no heat generation at rest
Vacuum-compatible and non-magnetic designs feasible
Parallel kinematics for enhanced dynamics and better multi-axis accuracy
NEXLINE® piezo walking drive free from wear and tear
Load capacity to 200 N
High precision with integrated 5 nm incremental sensors + picometer resolution dithering mode

Specifications

pdf
pdf

Datasheet N-510KAWP

pdf - 668 KB
pdf - 668 KB

Ordering Information

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It is an example of what is feasible with our technology. We would like to work with you on a solution that fits your needs.
N-510KAWP
NEXLINE® Z / Tip / Tilt Platform

Downloads

Datasheet

pdf
pdf

Datasheet N-510KAWP

pdf - 668 KB
pdf - 668 KB