N-510KAWP High-Force NEXLINE® Z / Tip / Tilt Platform

Nanometer Precision for Semiconductor Industry, Wafer Alignment

Self-locking, no heat generation at rest
Vacuum-compatible and non-magnetic designs feasible
Parallel kinematics for enhanced dynamics and better multi-axis accuracy
NEXLINE® piezo walking drive free from wear and tear
Load capacity to 200 N
High precision with integrated 5 nm incremental sensors + picometer resolution dithering mode


Travel ranges

Max. load

Dimensions

N-510 NEXLINE® Z, tip, tilt platform

Z: 1.3 mm

θX, θY: 10 mrad

200 N

Ø 360 mm (14.2'')

clear aperture: Ø 250 mm

Downloads

Datasheet

pdf
pdf

PI Datasheet N-510KAWP

High-Force NEXLINE® Z / Tip / Tilt Platform Nanometer Precision for Semiconductor Industry, Wafer Alignment
pdf - 668 KB
pdf - 668 KB