N-510KHFS High-Stiffness NEXLINE® Z Stage

High-Precision Positioning, with Capacitive Sensors

N-510KHFS High-Stiffness NEXLINE® Z Stage
Product Description Specifications Downloads Quote / Order

Specifications

Datasheet N-510KHFS

Document language
pdf - 667 KB
pdf - 665 KB

Downloads

Datasheet

Datasheet N-510KHFS

Document language
pdf - 667 KB
pdf - 665 KB

Quote / Order

Ask for a free quote on quantities required, prices, and lead times or describe your desired modification. All products available online can be ordered directly.

N-510KHFS

Hybrid Z-Stage, NEXLINE® and PICMA® Direct Drive, 440 µm, 2 nm Resolution

  • Closed-loop resolution to 2 nm
  • Self-locking, no heat generation at rest
  • Hybrid piezo drive combines high stiffness, long travel and very fast response
  • Travel range 400 µm coarse, 40 µm fine
  • Direct metrology: One single control loop with capacitive sensors
  • Piezo stepping drive w/o wear and tear and outstanding lifetime due to PICMA® piezo actuators