N-510KHFS High-Stiffness NEXLINE® Z Stage

High-Precision Positioning, with Capacitive Sensors

PI N-510KHFS
Closed-loop resolution to 2 nm
Self-locking, no heat generation at rest
Hybrid piezo drive combines high stiffness, long travel and very fast response
Travel range 400 µm coarse, 40 µm fine
Direct metrology: One single control loop with capacitive sensors
Piezo stepping drive w/o wear and tear and outstanding lifetime due to PICMA® piezo actuators

Specifications

pdf
pdf

Datasheet N-510KHFS

pdf - 667 KB
pdf - 665 KB

Ordering Information

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It is an example of what is feasible with our technology. We would like to work with you on a solution that fits your needs.
N-510KHFS
Hybrid Z-Stage, NEXLINE® and PICMA® Direct Drive, 440 µm, 2 nm Resolution

Downloads

Datasheet

pdf
pdf

Datasheet N-510KHFS

pdf - 667 KB
pdf - 665 KB