N-510KHFS High-Stiffness NEXLINE® Z Stage

High-Precision Positioning, with Capacitive Sensors

PI N-510KHFS
Closed-loop resolution to 2 nm
Self-locking, no heat generation at rest
Hybrid piezo drive combines high stiffness, long travel and very fast response
Travel range 400 µm coarse, 40 µm fine
Direct metrology: One single control loop with capacitive sensors
Piezo stepping drive w/o wear and tear and outstanding lifetime due to PICMA® piezo actuators

Specifications

pdf
pdf

PI Datasheet N-510KHFS

High-Stiffness NEXLINE® Z Stage High-Precision Positioning, with Capacitive Sensors
pdf - 667 KB
pdf - 665 KB

Downloads

Datasheet

pdf
pdf

PI Datasheet N-510KHFS

High-Stiffness NEXLINE® Z Stage High-Precision Positioning, with Capacitive Sensors
pdf - 667 KB
pdf - 665 KB