Control of Piezo Actuators and Piezo-Based Positioning Systems PI piezo drivers and motion controllers offer: High linearity, high long-term stability Positioning with subnanometer accuracy Noise approx [...] of the piezo actuator is not adjusted, charge control does not replace position-controlled operation for tasks where positions need to be maintained for longer periods. Typical expansion of piezo actuators [...] voltages adapted to various piezo actuators and piezo drives Analog interfaces for fast direct commanding in real time Short circuit protection Low-Noise and Drift-Free Piezo Amplifiers The characteristic

subsystems for motion and positioning. The control is an important system component and is also supplied by PI. This not only provides sophisticated control concepts but also the hardware and software [...] Fields of Motion and Positioning PI does not only develop and produce a broad range of positioning stages and actuators for linear, rotary and vertical motion or combinations of different axes. PI also adapts

scanning stage is designed to directly integrate a microscope lens. It provides up to 0.8 mm travel, nanometer precision, and very smooth motion. The >> P-620 to P-629 piezo flexure nanopositioning stage family [...] coil or piezo drive), and resolution can be specifically adapted to the overall design of the OCT device. Sophisticated controller technology and a variety of interfaces allow easy access to the stage. Typical [...] Flexure-Guided Nanopositioning Scanners Several piezo-driven motion principles are feasible. The two examples shown below are based on piezoelectric stack actuators driving a flexure-guided stage platform (right)

Space Control Settling behavior of a system with optimized PID parameters (blue) and Advanced Piezo Control (pink) An alternative control concept is offered for nanopositioning systems: Advanced Piezo Control [...] the Electronics All digital PI controllers for nanopositioning act the same. This allows any piezo device tuned to a digital control to also be operated by other controllers without any loss of performance [...] applications) with an XY piezo scanning stage and conventional PID controller. The outer curve shows the target position, the inner curve shows the actual motion of the stage The same scan as on the left

of a piezo nanopositioning system. The capacitive sensor (bottom) shows a considerably higher resolution than the laser interferometer (top) Maximum Accuracy Through Direct Metrology Nanopositioning systems [...] hysteresis that occurs in the drivetrain is thus automatically eliminated. Position-controlled piezo nanopositioning systems achieve exceptional motion linearity, high long-term stability and a stiff, [...] sensors. Analog electronics for piezo control and position analysis achieves a nonlinearity of below 0.02% (15 µm travel range at 10 V at the control input) The processing and measurement electronics only d

of a thin metal or semiconductor foil (piezo resistant), which is attached to the piezo ceramics or, for improved precision, to the guiding system of a flexure stage. This type of position measurement is [...] of the nanopositioning system. The information on resolution, linearity, and repeatability in the respective data sheet reflect the specifications of the overall system, including controller, mechanics [...] Right Position Sensor Technology PI offers the widest range of high-dynamics and high-resolution nanopositioning systems worldwide. Their linearity and repeatability would not be possible without highest-resolution

implemented an active yaw control algorithm on the dual motor axis of the PIglide HS Planar XY stage. Y axis and Yaw axis have separate control loops for linear and rotational motion control. Better dynamic p [...] to 5 µrad/100 mm Active yaw control for gantries Direct drive linear & torque motors for smooth, high speed scanning State of the art controls powered by ACS Motion Control Experience with Air Bearing [...] offers comprehensive precision air bearing motion control and positioning products and systems. With 4 decades of experience in piezo nanopositioning systems design and motorized precision positioning

levels of piezo actuators. These range from the pure drive component via single-axis stages with integrated nanopositioning sensor to highly complex, multi-axis positioning stages with digital control. Stack [...] Piezo Actuators with and without Guiding Piezo Actuators Have Excellent Drive Properties Piezo Actuators Have Excellent Drive Properties The movement of piezo actuators is based on solid-state effects [...] integrated piezo systems. Easy lever amplification: The point contact decouples shear forces and thus tensile stress on the piezo ceramic PiezoMove® OEM Lever Actuators with Built-In Guide PiezoMove® actuators

of guiding accuracy and stiffness, however, the design requires much more complex geometries. A piezo stage with integrated flexure guide achieves a guiding accuracy of only a few nanometers or microradians [...] Guiding Accuracy Through Flexure Joints Integrated Guiding, Motion Amplifier and Preload In nanopositioning technology, flexure guides have proved to be suitable for positioning tasks of up to several [...] hence also function, without any problem, in a vacuum . Flexures as Levers The travel range of a piezo actuator can also be multiplied by integrating a lever mechanism. The actuator is mechanically integrated

such as subnanometer resolution XYZ stages, piezo scanning Z stages, and holders for slides, Petri dishes, and microtiter plates. When combined with a piezo-controlled focus scanner, the system delivers [...] options: 100 µm, 400 µm, and 800 µm >> P-725.xCDE1S PIFOC® Motion Control Most systems include a controller, whereas some offer optional controllers with varying levels of precision Trajectory support for 1D [...] Fine positioning stages (X / Y / Z / ΘX / ΘY / ΘZ) Comprehensive accessory range Custom versions available for other microscopes upon request XY Axis - Precise Sample Positioning Stage Exceptional stability