XY Piezo Flexure Stages
XY Piezo Flexure Stages High-precision 2-axis nanopositioning systems integrate PICMA® piezo actuators for maximum reliability. Repeatable, drift-free positioning with optimal stability is possible by [...] by the use of high-quality nanometrology sensors. 2-Axis piezo scanners for small loads are frequently used for scanning and tracking processes. Their rapid step-and-settle motions improve the resolution
Replaced product
P-541.2 • P-542.2 XY Piezo Stage
Low-Profile XY Nanopositioner with Large Aperture
Linear Piezo Flexure Stages
Linear Piezo Flexure Stages PI’s nanopositioning stages and scanners combine nanometer-precision resolution and guiding precision with minimum crosstalk. This makes them particularly suitable for reference [...] try or in inspection systems for semiconductor chip production. Linear piezo stages with PICMA® piezo actuator drive and flexure guidings are available for travel ranges up to 1.5 mm.
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P-630 • P-631 High Dynamics Piezo Nanopositioner
1 Axis with Large Aperture
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S-303 Piezo Phase Shifters
High Dynamics, Nanometer-Precision Piezo Phase Shifters
Multi-Axis Piezo Flexure Stages
Multi-Axis Piezo Flexure Stages PI’s multi-axis piezo flexure stages allow positioning and scanning with sub-nanometer precision in up to 6 axes, including tip, tilt and yaw motion. Versions range from [...] optical metrology, fiber positioning and photonics, as well as atomic force microscopy. All piezo nanopositioning systems are factory-calibrated and delivered with measurement log.
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P-363 PicoCube XYZ Piezo Scanner
Dynamic Nanopositioner for Scanning Probe Microscopy
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P-313 PicoCube XY(Z) Piezo Scanner
Picometer Precision, High Bandwidth, for Scanning Probe Microscopy
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P-587 6-Axis Piezo Nanopositioner
Long Travel Ranges, Direct Position Measuring
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