Positioning in High Vacuum (HV) & Ultrahigh Vacuum (UHV)
variants that are vacuum-suitable to 10 -6 hPa (HV), such as the H-811.I2 for velocities up to 20 mm/s (left) or the H-850 for payloads up to 250 kg. UHV to 10 -7 hPa: Customized 6 degrees of freedom solution [...] atmospheric pressure down to 10 -9 hPa. In some cases, 10 -10 hPa can be reached. Table 1 shows the different measures taken to achieve the corresponding vacuum class. UHV to 10 -9 hPa: Precision linear stage L-509 [...] vacuum. The products provided by PI achieve a pressure down to 10 -9 hPa. In some cases, 10 -12 hPa can be reached. Vacuum class Abbr. hPa mbar Torr Rough vacuum RV 300 to 1 300 to 1 225 to 0.75 Fine vacuum