compensation for safe operation >> V-308 Voice Coil PIFOC® Focus Drive XY Axis - Fine Positioning of the Workpiece Piezo-based XY scanner for highly-dynamic positioning with nanometer precision Parallel-kinematic [...] with long-term stability High tracking accuracy in the nanometer range >> P-527 Multi-Axis Piezo Scanner XY Axis - Workpiece Positioning Over Extended Travel Ranges Highly-dynamic ironless linear motors [...] output Servo control for fast step-and-settle and for disturbance rejection Option of adding fast piezo control for improved performance >> Controllers and Drivers System in Motion Do you have questions

astronomy, precision 6-axis positioner for outdoor applications High-dynamics XY piezo scanner for imaging Fast XY piezo scanner. Cost-effective OEM slide for imaging Learn more Cost-effective OEM piezomotor [...] the piezo actuator even under harsh environmental conditions Miniaturized piezo tubes (microtubes) can be made by a special production process Learn more Spherical piezo elements Learn more Piezo disks [...] PICMA® multilayer piezo actuators Compact linear stage optimized for large volume production of several 1000 units High-precision Z actuator für automation in life science OEM planar scanner with linear encoder

used in laser seam welding is to move the workpiece to be welded under a laser galvo scanner head. The galvo scanner provides numerous additional control features, for example, expanding the laser source’s [...] the full potential of galvo scanners for laser seam welding, PI offers high-precision motion control solutions, including special software to simplify integrating galvo scanners and laser devices into motion [...] Highly accurate weld path​ High welding quality​ High throughput ​ Easy scanner integration Z Axis – Control of Galvo Scanner’s Vertical Height to Maintain Laser Spot Size Precision ball screw linear stage

scan system from SCANLAB with an XY galvanometer scanner for beam control >> SCANLAB excelliSCAN scan-head Workpiece Positioning XY linear motor stages or planar scanners for high geometric characteristics [...] motion system, the scanner, and the laser modulation. The control software of XL SCAN automatically splits the desired pattern trajectory into a path for the scanner, a path for the XY stages and the control [...] positioning systems and a highly dynamic galvanometer scanner that fulfills industrial production needs. SCANLAB GmbH produces galvanometer scanners, with certain models being enhanced to synchronously

subnanometer resolution XYZ stages, piezo scanning Z stages, and holders for slides, Petri dishes, and microtiter plates. When combined with a piezo-controlled focus scanner, the system delivers exceptional [...] Travel ranges up to 200 µm × 200 µm × 200 µm Exceptional durability with PICMA® piezo actuators >> P-545.xR8S PInano® XY(Z) Piezo System Z Axis - Fine Positioning of Microscope Objectives Drive World famous [...] available for other microscopes upon request XY Axis - Precise Sample Positioning Stage Exceptional stability and minimal long-term drift​ High-resolution PILine® piezo linear drives for precise motion, small

challenges faced are contamination risks to the wafer, accurately positioning the modified layer onto both XY axes to enable the narrowest possible streets, and maintaining the focus within the wafer and track [...] Synchronized advanced laser control Z Axis - High-Dynamic Laser Focus Control Wear-free, lever-amplified piezo drives for 24/7 operations without particle generation Mechanical design with high stiffness and high [...] match the wafer thickness Fine positioning with subnanometer resolution >> P-725 PIFOC® Objective Scanner θX/θY/Z Axis - High-Precision Wafer Alignment and Positioning Parallel-kinematic design for wafer

Supported by measurement data / Mapping XY Axis - Workpiece Positioning Choice between high-load XY linear stages with various travel ranges from 102 mm to 407 mm XY drag chain cable management for smooth [...] brackets for flexible mounting options Galvo scanner fixture User interface software >> SPiiPlusSPC for complete control of machine motion, lasers, scanners, cameras, and automation components Experience [...] smooth integration Stage tuning for selectable payloads Metrology options: XY orthogonality to 35 to 20 µrad, axis mapping, 2D mapping High dynamic motors in various performance classes Connector for purge

and flatness >> Direct Drive Linear Motor Stages >> Planar Scanner with Air Bearing θZ Z Tip/Tilt Axis - Wafer Positioning Multi-axis, hybrid piezo motor technology providing compensation of wafer misalignment [...] compatibility Advanced control features Flexible design for customization Optional active vibration control XY Axis - Precision Scanning and Step-and-Settle Motion Granite base for high stiffness and increased [...] Integrated cable management for reduced motion drag and long lifetime Optional granite-based planar scanner with air bearings and yaw control for 24/7 high duty cycle operations with minimal runout errors

ree with long lifetime in 24/7 operations >> A-523 Z Tip/Tilt Stage XY Axis – Wafer Step-and-Scan Motion Air-bearing planar scanner with ironless linear motors for high, cog-free scanning speed and fast [...] cost of ownership Secured yield Z Axis – High-Dynamic Laser Focus Control Wear-free, lever-amplified piezo drives for 24/7 operations without particle generation Mechanical design with high stiffness and high [...] Up to 800 μm travel range Fine positioning with subnanometer resolution >> P-725 PIFOC® Objective Scanner θX/θY/Z Axis – High-Precision Wafer Alignment and Positioning Parallel-kinematic design for wafer

products such as the V-308 objective scanner (voice coil) and P-725 (lever-amplified piezo drives), precision axes and directly driven XY stages (V-738), or ultrasonic XY stages (U-781) for moving the slides