New Active Alignment System for the Coupling of Photonic Structures to Fiber Arrays
The system combines the proven H-811 hexapod for large travel ranges with the fast acting P-616 NanoCube® nanopositioner for accuracies in the single-digit nanometer range. In combination, the two subsystems [...] and arrays to PICs and SiP structures. The high dynamics and wear-free working principle of the NanoCube® also allows continuous tracking for dynamic compensation of drift effects during coupling or curing [...] rotations about an optical axis, focal point, beam waist or other desirable position. The P-616 NanoCube®, which also has a parallel-kinematic design, offers travel ranges of up to 100 µm in X, Y, and