Rotating Electric Motors from PI
19" housing. Fig. 1: PLS-85 with 2-phase stepper motor, without position control, 100 nm steps Fig. 2: PLS-85 with 2-phase stepper motor, without position control, 25 nm steps Fig. 1 shows 100 nm steps [...] steps. On average, these deviations are only ±5 nm. Position Control Fig. 3: LS-110 with 2-phase stepper motor in control, 1 V-peak-to-peak sensor signal, 50 nm steps The position behavior for small steps [...] due to the interferometer resolution of 5 nm. Fig. 5: LS-180 with 2-phase stepper motor, without position control, position measurement Fig. 6: LS-180 with 2-phase stepper motor, without position control