Positioning in High Vacuum (HV) & Ultrahigh Vacuum (UHV)
and spindle made of stainless steel with vacuum grease Cannulated screws Bakeout temperature max. 120°C with/ 150°C without measuring system Tab. 1: Different measures taken to achieve the corresponding [...] of approximately 10 l. The small vacuum chamber is equipped with a pump stand consisting of a 400 l/s (N2) turbomolecular pump and a pressure sensor for continuous pressure sensing, which means that pressures [...] large stages up to a length of 800 mm, hexapods, and for multi-axis systems. A pump stand with a 700 l/s (N2) turbomolecular pump and a pressure sensor allow testing down to 10 -9 hPa. Bakeout temperatures