Manufacturing in Cleanrooms at PI
According to US FED STD 209E Particle per m 3 Class 0.2 µm 0.3 µm 0.5 µm 5.0 µm 100 26,486 10,594 3,531 1,000 35,315 247 10,000 353,147 2,472 100,000 3,531,470 24,720 Available Cleanrooms / Ultraclean [...] both standards in the following tables. Cleanroom Classification According to ISO14644-1 Particles per m³ Class 0.1 µm 0.2 µm 0.3 µm 0.5 µm 1.0 µm 5.0 µm ISO 5 100,000 23,700 10,200 3,520 832 ISO 6 1,000,000 [...] Manufacturing space in ISO class 5 cleanroom at PI Karlsruhe Cleanroom classification Available space in m 2 ISO 5 250 ISO 6 - ISO 7 600 ISO 8 3,000 Cleanrooms at PI Karlsruhe Measuring technology space in ISO