Positioning in High Vacuum (HV) & Ultrahigh Vacuum (UHV)
unlimited travel range and a repeatability to 20 µrad. HV to 10 -6 hPa: Compact linear stages M-110, M-111 and M-112 suitbale for XY setups. Linear, rotation, Z stages and accessories suitable for vacuum [...] Greased motor Standard measuring system Anodized aluminum components; brass allowed; plastics allowed 2 m PTFE cable with standard connector Guides and spindles with vacuum grease Partly with cannulated screws [...] 80°C to 10 -7 hPa HV Motor HV measuring system Aluminum, blank; brass allowed; selected plastics 2 m PI or PTFE cable with UHV connector Guide and spindle made of stainless steel with vacuum grease Cannulated