Positioning in High Vacuum (HV) & Ultrahigh Vacuum (UHV)
and force generation up to 600 N features vacuum-suitable incremental sensors. UHV to 10 -10 hPa: The P-733.3 piezo system achieves travel ranges up to 100 μm × 100 μm in X, Y and to 10 μm in Z. The integrated [...] a bakeout temperature of up to 80°C can be achieved. HV to 10 -6 hPa: Precision rotation stage L-611 with unlimited travel range and a repeatability to 20 µrad. HV to 10 -6 hPa: Compact linear stages