XY Piezo Flexure Stages
XY Piezo Flexure Stages High-precision 2-axis nanopositioning systems integrate PICMA® piezo actuators for maximum reliability. Repeatable, drift-free positioning with optimal stability is possible by [...] by the use of high-quality nanometrology sensors. 2-Axis piezo scanners for small loads are frequently used for scanning and tracking processes. Their rapid step-and-settle motions improve the resolution
Replaced product
P-541.2 • P-542.2 XY Piezo Stage
Low-Profile XY Nanopositioner with Large Aperture
Linear Piezo Flexure Stages
Linear Piezo Flexure Stages PI’s nanopositioning stages and scanners combine nanometer-precision resolution and guiding precision with minimum crosstalk. This makes them particularly suitable for reference [...] for interferometry or in inspection systems for semiconductor chip production. Linear piezo stages with PICMA® piezo actuator drive and flexure guidings are available for travel ranges up to 1.5 mm.
Replaced product
P-630 • P-631 High Dynamics Piezo Nanopositioner
1 Axis with Large Aperture
Replaced product