Integrated Piezo Actuators

Submillisecond Response Time and Subnanometer Resolution

  • Case with mechanical adapters for electrical insulation, simple integration and for protecting the actuator from ambient conditions
  • Mechanical preload allows dynamic operation
  • Flexure guides for straight motion
  • Mechanical lever amplification integrated into the flexure guide for large travel ranges
  • Strain gauge sensors (SGS) for repeatabilities down to a few nanometers

Applications

Mechanical integration of piezo actuators facilitates their application. To avoid pull forces at the piezo element, which necessarily occur in dynamic applications due to the inertia of the moving load, the piezo element must be provided with a mechanical preload. This can be done in mechanical cases or by means of flexure joints. The latter additionally guide or deflect the direction of motion or increase the travel range through lever amplification. PI's preloaded integrated piezo actuators offer an integration level between the pure piezo element and the piezo positioning system for simple positioning tasks.

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PiezoMove® Lever-Amplified Actuators

Guided Actuators with Travel Ranges of up to 2 mm

Guided and preloaded multilayer piezo actuators with lever amplification are used for valves, pumps, micro- and nanoliter dosing, active vibration isolation, sample handling, and imprint technologies in microfluidics, biotechnology, medical technology, mechatronics, adaptive systems technology, laser technology, and metrology.

Mechanical guiding, preload and lever amplification for travel ranges of up to 2 mm
Versions with strain gauge sensors for repeatabilities down to a few nanometers available
Low-cost original equipment manufacturer (OEM) solutions for integration, also for large quantities

Compact Actuators

Preloaded PICMA® Piezo Linear Actuators

Highly dynamic applications that simultaneously have high precision and force generation requirements can be found, among others, in precision mechanical engineering, material processing, material forming, and in active compensation of vibrations. Designs for vacuums down to 10-9 hPa and for particularly high or low operating temperatures are available.

Submillisecond response time and subnanometer resolution
Versions with SGS positioning available
Waterproof versions available

High-Load Actuators

Preloaded Compact PICA Piezo Linear Actuators

Highly dynamic applications that simultaneously have high precision and force generation requirements can be found, among others, in precision mechanical engineering, material processing, material forming, and in active compensation of vibrations. Designs for vacuums down to 10-9 hPa and for particularly high or low operating temperatures are available.

Submillisecond response time and subnanometer resolution
Compact stainless steel case with variable end pieces
Versions with SGS positioning available

PICMA® Bender Multilayer Actuators

with Position Sensor

Bimorph design, symmetric translation
Submillisecond response time and subnanometer resolution
Easy to integrate

Piezo Disk Translators

Bimorph design, symmetric translation
High dynamics
Low profile, easy to integrate

Motion Controllers and Amplifiers

PI offers a wide range of options for controlling integrated piezo actuators from cased digital motion controllers to OEM PC boards:

 

Which Drive Electronics
is Suitable?
PiezoMove® / PICMA®
without Sensors
U <120 V
PICA
without Sensors
U <1000 V
PiezoMove® / PICMA®
with Strain Gauge Sensors
PICA
with Strain Gauge Sensors
Mid-range dynamics,
mid-range loads
>> E-836
>> E-610
E-420>> E-610
>> E-625
E-420

Mid-range dynamics,
mid-range loads,
large quantities

>> E-831>> E-462--
Fast switching applications>> E-617
>> E-618
>> E-506
>> E-481>> E-500>> E-481
High loads
(>100 kg)
-E-420-E-420

 

 

Drivers and Controllers for PICMA® Stack/Chip Multilayer Actuators

Piezo amplifiers for >> PICMA® Multilayer Piezo Actuators offer an output voltage of up to 130 V.
Amplifiers with high output current allow dynamic operation of the actuators and precise positioning while requiring low power.

PI E-610.00
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E-610 Piezo Amplifier / Controller

1-Channel OEM Piezo Driver Module with Optional Position Servo-Control

  • Cost-effective 1-channel OEM solution
  • Closed-loop and open-loop versions
  • Notch filter for higher bandwidth
  • Position control with strain gauge or capacitive sensor
  • Peak current 180 mA
PI E-831
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E-831 OEM Piezo Driver

Low-cost module with separate power supply

  • Compact piezo power amplifier
  • Peak current up to 250 mA
  • Cost-efficient
  • Low noise, high stability
  • Easy integration
  • Short-circuit-proof, full overcurrent and temperature protection
PI E-836.03 OEM
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E-836 Compact Piezo Amplifier / OEM Module

Cost-Effective, Low-Noise Piezo Amplifiers for Dynamic Piezo Actuator Operation

  • Piezo amplifier unit (bench-top) and OEM module
  • Peak current up to 100 mA
  • Easy integration
  • Power-up / down without voltage spikes
  • 24 V operating voltage
PI E-663.00
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E-663 Three-Channel Piezo Driver

For Open-Loop Piezo Systems and Actuators without Position Sensors

  • 3 independent channels
  • Peak power 3 × 14 W
  • 3 LED voltage displays
  • Output voltage range -20 to 120 V
PI E-617
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E-617 High-Power Piezo Amplifier

Top-Hat & OEM Modules with Energy Recovery for High-Dynamics 24/7 Operation

  • Peak power to 280 W
  • High currents to 2000 mA
  • Energy recovery for low power consumption
  • OEM module and top-hat-rail versions
PI E-618
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E-618 High-Power Piezo Amplifier / Servo Controller

High Currents, High Dynamics

  • Peak current 20 A
  • Microsecond rise time
  • 15 kHz bandwidth for high dynamics applications
  • Overheat protection for piezo actuators with temperature sensor
PI E-503.00
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E-503 Piezo Amplifier Module

3 Channels, for E-500 Piezo Controller System

  • Module for E-500 piezo controller rack
  • Peak current 3 × 140 mA
  • Output voltage range -30 to 130 V
  • Position control (optional)
  • Computer interface and display modules
PI E-505.00
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E-505 Piezo Amplifier Module

High Power, E-500 Piezo Controller System

  • Peak current up to 10 A
  • Output voltage range -30 to 130 V
  • Module for E-500 piezo controller rack
  • Position control (optional)
  • Computer interface and display modules
PI E-504
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E-504 Piezo Amplifier Module

High Power through Energy Recovery, E-500 Piezo Controller System

  • Peak power 280 W
  • High average output power 100 W
  • Very energy efficient through energy recovery
  • Output voltage range -30 to 130 V
  • Module for E-500 piezo controller rack
  • Position control (optional)
  • Computer interface and display modules
PI E-506
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E-506 Linearized Piezo Amplifier

Improves Linearity Also Without Position Control

  • Highly linear amplifier module
  • For dynamic applications
  • Output voltage range -30 to 130 V
  • Peak current 2 A, average current 215 mA

Drivers and Controllers for PICA Stack/Power/Thru Actuators

Piezo amplifiers for >> PICA Actuators offer a voltage range of up to 1100 V, which is available as unipolar or bipolar voltage. Amplifiers with high output current allow dynamic operation of the actuators and precise positioning while requiring low power.

PI E-481 E-482
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E-481 PICA Piezo High-Power Amplifier/Controller

2000 W and Energy Recovery for High Efficiency

  • Peak power 2000 W
  • Integrated energy recovery
  • Output voltage 0 to ±1100 V or bipolar
  • Overheat protection for piezo actuators with temperature sensor
  • Position control (optional)
  • Computer interface and display modules
PI E-481 E-482
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E-482 PICA High-Power Piezo Driver / Servo Controller

High Energy Efficiency through Energy Recovery

  • Peak current 6 A
  • Output voltage to 1050 V
  • Integrated energy recovery
  • Temperature sensor protects piezo actuator from overheating
PI E-471 E-421 E-516
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E-470 • E-472 • E-421 PICA Piezo Controller

Modular High-Power Amplifier / Controller

  • Peak power 550 W
  • Output voltage range 3 to 1100 V or bipolar
  • Position control (optional)
  • Computer interface and display modules
PI E-508
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E-508 PICA Piezo Amplifier Module

High-Power Module with 1100 V Output Voltage, E-500 Piezo Controller System

  • Peak power up to 400 W
  • Output voltage range 3 to ±1100 V or bipolar
  • Module for E-500 piezo controller rack
  • E-508.OE for switching applications
  • Position control (optional)
  • Computer interface and display modules
PI E-464
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E-464 PICA Piezo Driver / Amplifier

For Piezo Systems and Actuators, for up to 3 Axes

  • 3 powerful channels
  • Peak power 3 × 25 W
  • Output voltage range 0 to 1100 V
  • 3 LED voltage displays
PI E-462.OE1
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E-462 PICA Piezo Driver

Compact, Bench-Top or OEM Module

  • Single-channel piezo driver
  • Output voltage range 10 to 1000 V
  • 12 V battery or external P/S operation
  • For static or quasi-static operation