Nanopositioning technology describes positioning systems with nanometer accuracy, which means accuracy up to a factor of 1000 more precise than micropositioning technology. From the classical perspective, micro- and nanopositioning technology are technologically different: Micropositioning technology with classical motorization, Nanopositioning technology based on >> Piezo Actuators. Improved control technologies, >> Sensor Technology, and guides, e.g., >> Air Bearing Technology, make it possible for systems with magnetic >> Direct Drives to push forward into the domain of nanopositioning technology. In this case, unparalleled dynamics are combined with the highest accuracy, and what’s more, a drive that is free of wear and this makes it ideal for applications with high demands on the lifetime.
When taking a look at micropositioning technology from a size point of view, the Q-Motion series is a classical representative: They are based on piezoelectric inertia drives, achieve travel ranges of several 10 millimeters, and a sensor resolution of up to 1 nm. They can also be manufactured with a width of only 20 mm and therefore, as a compact drive solution, now make completely new applications possible.
This shows the Q-Motion series. With piezo inertia drives, linear and rotary >> Stages are manufactured with a width of 20 mm, travel ranges of several 10 millimeters and a sensor resolution up to 1 nm.