Coordination of motion
The E-713 Motion Controller supports piezo nanopositioning systems with capacitive sensors and coordinates motion for up to 6 logical axes. Depending on the controller configuration, axis motion is based on up to 8 piezo channels and 6 sensor channels. Users can easily command axis motions as the controller handles conversion between axis-related and channel-related values.
Integration of analog signals
Depending on the configuration, 4 high-resolution analog inputs and outputs with high bandwidth are available. Users can configure each of the analog inputs and outputs for various purposes, for example, as a control input or monitor output. Digital linearization of the inputs via fourth-order polynomials and filtering for reduced signal noise make possible applications requiring extremely high precision.
Analysis and automation
The flexibly configurable data recorder can be used to record operating data such as motor control, velocity, position, or position error. Execution of macros on the controller facilitates standalone operation.
Fast periodic motion
The integrated wave generator can save periodic motion profiles and output them. During fast periodic motion, such as that typical for scanning applications, it is possible to increase tracking accuracy through optional dynamic digital linearization (DDL) by up to three orders of magnitude.
Extensive software assistance
The PI user software enables fast startup with no programming skills needed as well as graphic depiction of signals and operations. Furthermore, there is an extensive set of drivers available, e.g., for use with C, C++, C#, Python, NI LabVIEW, or MATLAB.
Scope of delivery
The scope of delivery includes the controller and a software package. It is recommended to order the piezo nanopositioning system and the controller together so that the components can be adapted to each other.
Application fields
Industry and research. Semiconductor manufacturing and inspection.
| Basics | E-713 PICMA® Controller, 3 axes | E-713 PICMA® Controller, 3 axes, analog I/O | E-713 PICMA® Controller, 6 axes | E-713 PICMA® Controller, 6 axes, analog I/O | |
|---|---|---|---|---|---|
| Housing type | Rack insert 19" 4U | Rack insert 19" 4U | Rack insert 19" 4U | Rack insert 19" 4U | |
| Drive type | PICMA® | PICMA® | PICMA® | PICMA® | |
| Axes | 3 | 3 | 6 | 6 | |
| Output channels | 4 | 4 | 8 | 8 | |
| Input channels | 3 | 3 | 6 | 6 | |
| Processor | PC-based | PC-based | PC-based | PC-based | |
| Application-related functions | Makro ǀ Startup macro ǀ Data recorder | Makro ǀ Startup macro ǀ Data recorder ǀ Fast Alignment | Makro ǀ Startup macro ǀ Data recorder | Makro ǀ Startup macro ǀ Data recorder ǀ Fast Alignment | |
| Drive functions | AutoZero | AutoZero | AutoZero | AutoZero | |
| Protective functions | Deactivation of the voltage output in case of internal overheating ǀ Switch-off of the servo mode in case of an error ǀ Automatic motor stop | Deactivation of the voltage output in case of internal overheating ǀ Switch-off of the servo mode in case of an error ǀ Automatic motor stop | Deactivation of the voltage output in case of internal overheating ǀ Switch-off of the servo mode in case of an error ǀ Automatic motor stop | Deactivation of the voltage output in case of internal overheating ǀ Switch-off of the servo mode in case of an error ǀ Automatic motor stop | |
| Configuration management | Import of parameter files ǀ Reading the ID chip ǀ Manual parameter input | Import of parameter files ǀ Reading the ID chip ǀ Manual parameter input | Import of parameter files ǀ Reading the ID chip ǀ Manual parameter input | Import of parameter files ǀ Reading the ID chip ǀ Manual parameter input | |
| Supported ID chip | ID chip 2.0 | ID chip 2.0 | ID chip 2.0 | ID chip 2.0 | |
| Motion and control | E-713 PICMA® Controller, 3 axes | E-713 PICMA® Controller, 3 axes, analog I/O | E-713 PICMA® Controller, 6 axes | E-713 PICMA® Controller, 6 axes, analog I/O | |
| Supported sensor signal | analog (cap.) | analog (cap.) | analog (cap.) | analog (cap.) | |
| Control variables | Position | Position | Position | Position | |
| Maximum control frequency (servo cycle) | 50000 Hz | 50000 Hz | 20000 Hz | 20000 Hz | |
| Motion types | Point-to-point motion ǀ Point-to-point motion with profile generator ǀ Wave generator | Point-to-point motion ǀ Point-to-point motion with profile generator ǀ Area scan routines ǀ Gradient search routines ǀ Wave generator | Point-to-point motion ǀ Point-to-point motion with profile generator ǀ Wave generator | Point-to-point motion ǀ Point-to-point motion with profile generator ǀ Area scan routines ǀ Gradient search routines ǀ Wave generator | |
| Motion coordination | Coordinated multi-axis motion | Coordinated multi-axis motion | Coordinated multi-axis motion | Coordinated multi-axis motion | |
| Interfaces and operation | E-713 PICMA® Controller, 3 axes | E-713 PICMA® Controller, 3 axes, analog I/O | E-713 PICMA® Controller, 6 axes | E-713 PICMA® Controller, 6 axes, analog I/O | |
| Communication interfaces | TCP/IP ǀ USB | TCP/IP ǀ USB | TCP/IP ǀ USB | TCP/IP ǀ USB | |
| On/off switch | Hardware switch on/off | Hardware switch on/off | Hardware switch on/off | Hardware switch on/off | |
| Display and indicators | Error LED ǀ Power LED ǀ On Target LED ǀ Overtemp LED | Error LED ǀ Power LED ǀ On Target LED ǀ Overtemp LED | Error LED ǀ Power LED ǀ On Target LED ǀ Overtemp LED | Error LED ǀ Power LED ǀ On Target LED ǀ Overtemp LED | |
| Command set | GCS 2.0 | GCS 2.0 | GCS 2.0 | GCS 2.0 | |
| User software | PIMikroMove | PIMikroMove | PIMikroMove | PIMikroMove | |
| Application programming interfaces | C, C++, C# ǀ MATLAB ǀ NI LabView ǀ Python | C, C++, C# ǀ MATLAB ǀ NI LabView ǀ Python | C, C++, C# ǀ MATLAB ǀ NI LabView ǀ Python | C, C++, C# ǀ MATLAB ǀ NI LabView ǀ Python | |
| Linearization | DDL option (Dynamic Digital Linearization) ǀ 4th order polynomials | DDL option (Dynamic Digital Linearization) ǀ 4th order polynomials | DDL option (Dynamic Digital Linearization) ǀ 4th order polynomials | DDL option (Dynamic Digital Linearization) ǀ 4th order polynomials | |
| Analog inputs | — | 4 | — | 4 | |
| Analog input signal | — | ±10.675 V differential, input impedance 150 kΩ, bandwidth maximum 25 kHz | — | ±10.675 V differential, input impedance 150 kΩ, bandwidth maximum 25 kHz | |
| Digital resolution of the analog input | — | 18 bit | — | 18 bit | |
| Analog outputs | — | 4 | — | 4 | |
| Analog output signal | — | ±12.775 V, output current maximum 60 mA per output, bandwidth maximum 12 kHz | — | ±12.775 V, output current maximum 60 mA per output, bandwidth maximum 12 kHz | |
| Digital resolution of the analog output | — | 16 bit | — | 16 bit | |
| Amplifier | E-713 PICMA® Controller, 3 axes | E-713 PICMA® Controller, 3 axes, analog I/O | E-713 PICMA® Controller, 6 axes | E-713 PICMA® Controller, 6 axes, analog I/O | |
| Resolution DAC/voltage resolution | 20 bit | 20 bit | 20 bit | 20 bit | |
| Sensor | E-713 PICMA® Controller, 3 axes | E-713 PICMA® Controller, 3 axes, analog I/O | E-713 PICMA® Controller, 6 axes | E-713 PICMA® Controller, 6 axes, analog I/O | |
| Digital resolution for the sensor input | 18 bit | 18 bit | 18 bit | 18 bit | |
| Sensor bandwidth | 10 kHz | 10 kHz | 10 kHz | 10 kHz | |
| Electrical properties | E-713 PICMA® Controller, 3 axes | E-713 PICMA® Controller, 3 axes, analog I/O | E-713 PICMA® Controller, 6 axes | E-713 PICMA® Controller, 6 axes, analog I/O | |
| Output voltage | -30 to +135 V | -30 to +135 V | -30 to +135 V | -30 to +135 V | |
| Short-circuit proof | Yes | Yes | Yes | Yes | |
| Average output power per channel | 8 W | 8 W | 8 W | 8 W | |
| Peak output power per channel | 25 W | 25 W | 25 W | 25 W | |
| Peak output power per channel, time limit | 5 ms | 5 ms | 5 ms | 5 ms | |
| Average output current per channel | 150 mA | 150 mA | 150 mA | 150 mA | |
| Peak output current per channel | 250 mA | 250 mA | 250 mA | 250 mA | |
| Peak output current per channel, time limit | 5 ms | 5 ms | 5 ms | 5 ms | |
| Miscellaneous | E-713 PICMA® Controller, 3 axes | E-713 PICMA® Controller, 3 axes, analog I/O | E-713 PICMA® Controller, 6 axes | E-713 PICMA® Controller, 6 axes, analog I/O | |
| Motor/actuator connector | D-sub 25W3 | D-sub 25W3 | D-sub 25W3 | D-sub 25W3 | |
| Sensor connector | D-sub 25W3 | D-sub 25W3 | D-sub 25W3 | D-sub 25W3 | |
| Connector analog input | — | LEMO EPG.00.302.NLN | — | LEMO EPG.00.302.NLN | |
| Connector analog output | — | LEMO EPG.00.302.NLN | — | LEMO EPG.00.302.NLN | |
| Connector TCP/IP | RJ45 socket, 8P8C | RJ45 socket, 8P8C | RJ45 socket, 8P8C | RJ45 socket, 8P8C | |
| Connector USB | USB socket type B | USB socket type B | USB socket type B | USB socket type B | |
| Connector for supply voltage | IEC 60320 type C14 | IEC 60320 type C14 | IEC 60320 type C14 | IEC 60320 type C14 | |
| Power connection | 100 to 240 V AC ǀ 50 to 60 Hz | 100 to 240 V AC ǀ 50 to 60 Hz | 100 to 240 V AC ǀ 50 to 60 Hz | 100 to 240 V AC ǀ 50 to 60 Hz | |
| Power entry fuse | 1 x T6.3AH, 250 V | 1 x T6.3AH, 250 V | 1 x T6.3AH, 250 V | 1 x T6.3AH, 250 V | |
| Maximum power consumption | 330 W | 330 W | 330 W | 330 W | |
| Operating temperature range | 5 to 40 °C | 5 to 40 °C | 5 to 40 °C | 5 to 40 °C | |
| Overall mass | 7892 g | 8054 g | 8584 g | 8746 g |
The specified output channels are amplifier channels.
The specified input channels are sensor channels.
The maximum output power is limited by the power supply of the housing and the number of available channels.
E-713 modular Motion Controller system
GCS commands for E-713 modular Motion Controller system
Ask for a free quote on quantities required, prices, and lead times or describe your desired modification.
Motion controller for piezo nanopositioning systems with capacitive sensors; 3 axes; TCP/IP and USB communication interfaces.
This configuration consists of the following modules:
─ 1 × E-713.R2: housing
─ 1 × E-713.M1: main module
─ 1 × E-713.S03CM: sensor processing module
─ 1 × E-713.D40P0L: amplifier module
Motion controller for piezo nanopositioning systems with capacitive sensors; 3 axes; 4 analog inputs and outputs; TCP/IP and USB communication interfaces.
This configuration consists of the following modules:
─ 1 × E-713.R2: housing
─ 1 × E-713.M1: main module
─ 1 × E-713.S03CM: sensor processing module
─ 1 × E-713.D40P0L: amplifier module
─ 1 × E-713.I44A0: analog interface module
Motion controller for piezo nanopositioning systems with capacitive sensors; 6 axes; TCP/IP and USB communication interfaces.
This configuration consists of the following modules:
─ 1 × E-713.R2: housing
─ 1 × E-713.M1: main module
─ 2 × E-713.S03CM: sensor processing module
─ 2 × E-713.D40P0L: amplifier module
Motion controller for piezo nanopositioning systems with capacitive sensors; 6 axes; 4 analog inputs and outputs; TCP/IP and USB communication interfaces.
This configuration consists of the following modules:
─ 1 × E-713.R2: housing
─ 1 × E-713.M1: main module
─ 2 × E-713.S03CM: sensor processing module
─ 2 × E-713.D40P0L: amplifier module
─ 1 × E-713.I44A0: analog interface module
