This product has been replaced by the following new product: Q-545 Q-Motion® Precision Linear Stage

M-664 Precision Stage with Linear Piezo Drive

Fast, Self-Locking, Low Profile

Travel range 25 mm
Only 15 mm profile height
Linear encoder with 100 nm resolution
Max. velocity 400 mm/s
Self-locking at rest, keine Wärmeentwicklung, no servo jitter

Precision-class micro translation stage

Integrierter Piezokeramischer Direktantrieb. Compact XY combinations available


PILine® piezo ultrasonic drive

Self-locking, with no heat generation at rest. Excellent start / stop dynamics. Crossed roller bearings. Noncontact limit and reference point switches


Direct-metrology linear encoder

High accuracy and repeatability


Fields of application

Industry and research. For Mikromanipulation, Qualitätssicherung, Biotechnologie


Valid patents

US patent no. 6,765,335B2 European patent no. 1267425B1



M-664.AP1 Adapter Plate for XY Mounting of M-664, 4 mm high



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Drawings / Images

M-664, dimensions in mm
The smallest closed-loop linear stages with self-locking PILine® drive: M-664 (right) and M-663 (left)

Ordering Information

This product is currently not in our price list.

It is an example of what is feasible with our technology. We would like to work with you on a solution that fits your needs.
PILine® Low-Profile Micropositioning Stage with P-664 Piezo Linear Motor, 25 mm, 2.5 N
Adapter Plate for XY Mounting of M-664, 4 mm high

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User Manual MP96

M-664 PILine® Micro Positioning Stage
pdf - 796 KB
pdf - 1 MB

Short Instructions MP121EK

M-66x, M-68x, U-521, U-62x, U-651 PILine® Stages
4.2.0 2017-04-18
pdf - 524 KB