This product has been replaced by the following new product: Q-545 Q-Motion® Precision Linear Stage

M-664 Precision Stage with Linear Piezo Drive

Fast, Self-Locking, Low Profile

Travel range 25 mm
Only 15 mm profile height
Linear encoder with 100 nm resolution
Max. velocity 400 mm/s
Self-locking at rest, keine Wärmeentwicklung, no servo jitter

Precision-class micro translation stage

Integrierter Piezokeramischer Direktantrieb. Compact XY combinations available

 

PILine® piezo ultrasonic drive

Self-locking, with no heat generation at rest. Excellent start / stop dynamics. Crossed roller bearings. Noncontact limit and reference point switches

 

Direct-metrology linear encoder

High accuracy and repeatability

 

Fields of application

Industry and research. For Mikromanipulation, Qualitätssicherung, Biotechnologie

 

Valid patents

US patent no. 6,765,335B2 European patent no. 1267425B1

 

Zubehör

M-664.AP1 Adapter Plate for XY Mounting of M-664, 4 mm high

 

Specifications

This content is only available on tablets or desktop devices.

Drawings / Images

M-664, dimensions in mm
The smallest closed-loop linear stages with self-locking PILine® drive: M-664 (right) and M-663 (left)

Ordering Information


This product has been replaced by the following new product: Q-545 Q-Motion® Precision Linear Stage

M-664.164
PILine® Low-Profile Micropositioning Stage with P-664 Piezo Linear Motor, 25 mm, 2.5 N
M-664.AP1
Adapter Plate for XY Mounting of M-664, 4 mm high

Ask about custom designs!

Downloads

Documentation

pdf
pdf

User Manual MP96

M-664 PILine® Micro Positioning Stage
2014-02-13
2014-02-13
pdf - 796 KB
pdf - 1 MB
pdf

Short Instructions MP121EK

M-66x, M-68x, U-521, U-62x, U-651 PILine® Stages
4.3.0 2017-06-23
pdf - 709 KB