Q-522 Q-Motion® Miniature Linear Stage

Piezomotors for Small Dimensions, High Resolution and a Favorable Price

Q-522 Q-Motion® Miniature Linear Stage with incremental encoder with up to 1 nm resolution (optional)
Only 22 mm wide and 10 mm high
Direct Position Measurement with Incremental Encoder with up to 1 nm resolution (optional)
Up to 2 nm minimum incremental motion
XY mounting without adapter
Q-622 Rotation Stage mountable without adapter
Suitable for high vacuum to 10-6 hPa, ultrahigh vacuum variants for 10-9 hPa are also available

Precision-class micropositioning stage

Q-Motion® stages have very small dimensions and a high position resolution in the nanometer range. The piezomotor drive principle and the electrical operation are cost-efficient and can be customized

 

PIShift piezo inertia drives

Self-locking when at rest, therefore no heat generation and no servo jitter. Velocity to 10 mm/s. 1 N holding force, 1 N feed force

 

Direct-measuring principle

Versions with noncontact optical linear encoder available. Resolution 4 nm or 1 nm, depending on the version. Versions with encoder feature a reference point switch

 

Vacuum and nonmagnetic environment

All Q-Motion stages are suitable for operation in high vacuum to 10-6 hPa. Furthermore, ultrahigh vacuum variants for 10-9 hPa are also available. Nonmagnetic variants are also available on request

 

 

Fields of application

Industry and research. For metrology, microscopy, micromanipulation, biotechnology and automation

Specifications

pdf
pdf

Datasheet Q-522

pdf - 1 MB
pdf - 1 MB
Q-522.000
Q-Motion® Miniature Linear Stage, 6.5 mm Travel Range, without Position Sensor, for Open-Loop Operation, 1 N Push/Pull Force, Dimensions 22 × 22 × 10 mm (W × L × H), Piezoelectric Inertia Drive
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Q-522.00U
Q-Motion® Miniature Linear Stage, 6.5 mm Travel Range, without Position Sensor, for Open-Loop Operation, 1 N Push/Pull Force, Dimensions 22 × 22 × 10 mm (W × L × H), Piezoelectric Inertia Drive, Vacuum-Compatible to 10-9 hPa
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Q-522.030
Q-Motion® Miniature Linear Stage, 6.5 mm Travel Range, Linear Encoder, 4 nm Resolution, 1 N Push/Pull Force, Dimensions 32 × 22 × 10 mm (W × L × H), Piezoelectric Inertia Drive
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Q-522.040
Q-Motion® Miniature Linear Stage, 6.5 mm Travel Range, Linear Encoder, 1 nm Resolution, 1 N Push/Pull Force, Dimensions 32 × 22 × 10 mm (W × L × H), Piezoelectric Inertia Drive
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Q-522.04U
Q-Motion® Miniature Linear Stage, 6.5 mm Travel Range, Linear Encoder, 1 nm Resolution, 1 N Push/Pull Force, Dimensions 32 × 22 × 10 mm (W × L × H), Piezoelectric Inertia Drive, Vacuum-Compatible to 10-9 hPa
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Q-522.100
Q-Motion® Miniature Linear Stage, 13 mm Travel Range, without Position Sensor, for Open-Loop Operation, 1 N Push/Pull Force, Dimensions 22 × 32 × 10 mm (W × L × H), Piezoelectric Inertia Drive
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Q-522.10U
Q-Motion® Miniature Linear Stage, 13 mm Travel Range, without Position Sensor, for Open-Loop Operation, 1 N Push/Pull Force, Dimensions 22 × 32 × 10 mm (W × L × H), Piezoelectric Inertia Drive, Vacuum-Compatible to 10-9 hPa
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Q-522.130
Q-Motion® Miniature Linear Stage, 13 mm Travel Range, Linear Encoder, 4 nm Resolution, 1 N Push/Pull Force, Dimensions 32 × 32 × 10 mm (W × L × H), Piezoelectric Inertia Drive
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Q-522.140
Q-Motion® Miniature Linear Stage, 13 mm Travel Range, Linear Encoder, 1 nm Resolution, 1 N Push/Pull Force, Dimensions 32 × 32 × 10 mm (W × L × H), Piezoelectric Inertia Drive
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Q-522.14U
Q-Motion® Miniature Linear Stage, 13 mm Travel Range, Linear Encoder, 1 nm Resolution, 1 N Push/Pull Force, Dimensions 32 × 32 × 10 mm (W × L × H), Piezoelectric Inertia Drive, Vacuum-Compatible to 10-9 hPa
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Q-522.200
Q-Motion® Miniature Linear Stage, 26 mm Travel Range, without Position Sensor, for Open-Loop Operation, 1 N Push/Pull Force, Dimensions 22 × 42 × 10 mm (W × L × H), Piezoelectric Inertia Drive
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Q-522.20U
Q-Motion® Miniature Linear Stage, 26 mm Travel Range, without Position Sensor, for Open-Loop Operation, 1 N Push/Pull Force, Dimensions 22 × 42 × 10 mm (W × L × H), Piezoelectric Inertia Drive, Vacuum-Compatible to 10-9 hPa
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Q-522.230
Q-Motion® Miniature Linear Stage, 26 mm Travel Range, Linear Encoder, 4 nm Resolution, 1 N Push/Pull Force, Dimensions 32 × 42 × 10 mm (W × L × H), Piezoelectric Inertia Drive
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Q-522.240
Q-Motion® Miniature Linear Stage, 26 mm Travel Range, Linear Encoder, 1 nm Resolution, 1 N Push/Pull Force, Dimensions 32 × 42 × 10 mm (W × L × H), Piezoelectric Inertia Drive
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Q-522.24U
Q-Motion® Miniature Linear Stage, 26 mm Travel Range, Linear Encoder, 1 nm Resolution, 1 N Push/Pull Force, Dimensions 32 × 42 × 10 mm (W × L × H), Piezoelectric Inertia Drive, Vacuum-Compatible to 10-9 hPa
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Ask about custom designs!

Downloads

Datasheet

pdf
pdf

Datasheet Q-522

pdf - 1 MB
pdf - 1 MB

Documentation

pdf
pdf

User Manual MP134

Q-522 Q-Motion Miniature Linear Stage, Piezoelectric Inertia Drive
pdf - 2 MB
pdf - 2 MB
pdf

Short Instructions MP139EK

Q-5xx, Q-6xx PIShift Stages
3.0.0 2017-03-23
pdf - 696 KB

3-D Models

zip

Q-522 STEP

zip - 2 MB