- Only 21 mm in width and 10 mm in height
- Direct position measurement with integrated incremental encoder
- Encoder resolution up to 1 nm
- Minimum incremental motion up to 2 nm
- Multi-axis system setups with adapter plate or bracket (available as an option)
Piezoelectric inertia drive
Piezo inertia drives are space-saving and affordable piezo-based drives with relatively high holding forces and a virtually unlimited travel range. The inertia drive principle is based on a single piezoelectric actuator that is controlled with a modified sawtooth voltage provided by special driver electronics. The actuator expands slowly and moves the runner. Due to its inertia, the runner is unable to follow the subsequent fast contraction of the actuator and remains at its position. With an operating frequency of up to 20 kHz, the drives acting directly on the runner and achieve velocities of max. 6 mm/s.
The linear stages are equipped with a noncontact measuring optical linear encoder and a reference switch. Resolution 4 nm or 1 nm, depending on the version.
Microassembly. Photonics. Optical alignment. Microscopy. Beamline instrumentation. Semiconductor technology. Testing.
Product Change Notification Q-xxx; N-765
Short Instructions MP139EK
Q-Motion® Positioners: Q-5xx, Q-6xx
User Manual MP145
Q-521 Q-Motion Miniature Linear Positioning Stage, Piezoelectric Inertia Drive
Q-521 3-D model
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