A-110 PIglide LC Linear Stage with Air Bearings

Inexpensive High Performance Nanopositioning Stage

A-110 PIglide LC Linear Stage with Air Bearings

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PIglide positioning systems have a magnetic linear motor, magnetically preloaded air bearings and an optical linear encoder: Noncontact and friction-free motion for the highest accuracy and reliability

Encoder
PIglide filter and air preparation kits
Single and multi-axis motion controller
XY setups and individual configurations
Base plates made of granite and systems for reducing vibration

PIglide positioning systems are ideally suited for many high-precision applications such as metrology, photonics, and precision scanning in semiconductor or flat panel display manufacturing.

Thanks to the friction-free motion, no particles are formed, which makes PIglide stages ideal for cleanroom applications.

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Datasheet

Datasheet A-110

Version / Date

2020-03-31

Version / Date

2020-03-31

Version / Date

2018-08-15

Document language

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pdf - 1 MB

Download

pdf - 1 MB

Download

pdf - 850 KB

Motion	A-110.050xx	A-110.100xx	A-110.200xx	A-110.300xx	A-110.400xx	Unit	Tolerance
Active axes	X	X	X	X	X
Travel range	50	100	200	300	400	mm
Pitch / yaw ⁽¹⁾	15	15	20	30	40	µrad	Max.
Straightness / flatness ⁽¹⁾	0.5	0.5	1	1	1.5	µm	Max.
Straightness / flatness per 10 mm travel range ⁽¹⁾	±10	±10	±10	±10	±10	nm	Max.
Velocity, unloaded ⁽²⁾	0.5	0.5	1	1	1	m/s	Max.
Acceleration, unloaded ⁽²⁾	20	20	20	20	20	m/s²	Max.

Mechanical properties	A-110.050xx	A-110.100xx	A-110.200xx	A-110.300xx	A-110.400xx	Unit	Tolerance
Load capacity in z ^{(3, 7)}	100	100	100	100	100	N	Max.
Moved mass	2.5	2.5	2.6	2.6	2.6	kg
Overall mass	6.3	7.5	11	12	14	kg
Guide type	Air bearing	Air bearing	Air bearing	Air bearing	Air bearing

Drive properties	A-110.050xx A-110.100xx	A-110.200xx A-110.300xx A-110.400xx	Unit	Tolerance
Drive type	Ironless 3-phase linear motor	Ironless 3-phase linear motor
Intermediate circuit voltage, RMS	48, nominal 60, max.	48, nominal 60, max.	V DC
Peak current, RMS	4.2	6.9	A	Max.
Nominal current, RMS	1.6	3.2	A	Max.
Peak force	60	85	N	Max.
Nominal force	20	39	N	Max.
Force constant, RMS	14.1	12.3	N/A	Typ.
Resistance phase-phase	11	3.6	Ω	Typ.
Inductance phase-phase	6	1.24	mH	Typ.
Back EMF phase-phase	10	10.1	V·s/m	Typ.
Cabling	Internal, no moving cable	External, moving cable

Positioning	A-110.xxxA	A-110.xxxB
Integrated sensor	Incremental linear encoder	Absolute encoder
Sensor signal	Sin/cos, 1 V peak-peak, 20 µm signal period	BiSS-C
Sensor resolution	4.88 nm ⁽⁴⁾	1 nm
Bidirectional repeatability	±0.1 µm	±0.1 µm
Positioning accuracy, uncalibrated ⁽⁵⁾	A-110.050: ± 1.5 µm A-110.100: ± 1.5 µm A-110.200: ± 2 µm A-110.300: ± 3 µm A-110.400: ± 4 µm	A-110.050: ± 1.5 µm A-110.100: ± 1.5 µm A-110.200: ± 1.5 µm A-110.300: ± 1.5 µm A-110.400: ± 1.5 µm
Positioning accuracy, calibrated ⁽⁵⁾	A-110.050: ± 0.5 µm A-110.100: ± 0.5 µm A-110.200: ± 0.5 µm A-110.300: ± 0.5 µm A-110.400: ± 0.5 µm	A-110.050: ± 0.5 µm A-110.100: ± 0.5 µm A-110.200: ± 0.5 µm A-110.300: ± 0.5 µm A-110.400: ± 0.5 µm

Miscellaneous	A-110
Operating pressure ⁽⁶⁾	75 to 85 psi (515 to 585 kPa)
Air consumption	< 1.0 SCFM (28 SLPM)
Air quality	Clean (filtered to 1.0 μm or better) - ISO 8573‑1 Class 1 Oil free - ISO 8573‑1 Class 1 Dry (-15 °C dew point) - ISO 8573‑1 Class 3
Materials	Hardcoat aluminum, stainless steel mounting hardware

⁽¹⁾ Dependent on the flatness of the surface, on which the stage is mounted.

⁽²⁾ Can be limited by the payload, controller or drive.

⁽³⁾ Assumes payload center of gravity is centered no more than 50 mm above the motion platform. The stage is designed for horizontal operation only.

⁽⁴⁾ Assumes 4096x interpolation. Contact PI for the use of other factors.

⁽⁵⁾ Improved accuracy can be obtained with controller-based error compensation. The stage must be ordered with a controller from PI to reach these values. Accuracy values assume short duration and do not consider the long-term effects of thermal drift on the stage.

⁽⁶⁾ To protect the stage against damage, it is recommended to connect an air pressure sensor to the Motion-Stop input of the controller.

⁽⁷⁾ Assumes an air bearing operating pressure of 80 psi (550 kPa).

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Product Note

Product Change Notification A-xxx.*C1

Version / Date

2018-08-02

Document language English

Download

pdf - 71 KB

Datasheet

Datasheet A-110

Version / Date

2020-03-31

Version / Date

2020-03-31

Version / Date

2018-08-15

Document language

Download

pdf - 1 MB

Download

pdf - 1 MB

Download

pdf - 850 KB

Documentation

User Manual A110D0001

A-110 PIglide LC Linear Air Bearing Stages

Version / Date

2020-03-23

Document language English

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3-D Models

A-110 3-D model

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White Paper

Air Bearings: When to Use and When to Avoid in Your Motion Application

All Positioning Stages are not Created Equal. Author: Matt Reck, PI

Version / Date

WP4003 2015-09

Document language English

Download

pdf - 3 MB

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A-110.050A1

PIglide LC Linear stage, air bearing, 50 mm travel range, incremental linear encoder with sin/cos signal transmission, 20 µm sensor signal period, ironless 3-phase linear motor, 48 V

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A-110.050B1

PIglide LC Linear stage, air bearing, 50 mm travel range, absolute linear encoder with BiSS-C signal transmission, 1 nm sensor resolution, ironless 3-phase linear motor, 48 V

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A-110.100A1

PIglide LC Linear stage, air bearing, 100 mm travel range, incremental linear encoder with sin/cos signal transmission, 20 µm sensor signal period, ironless 3-phase linear motor, 48 V

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A-110.100B1

PIglide LC Linear stage, air bearing, 100 mm travel range, absolute linear encoder with BiSS-C signal transmission, 1 nm sensor resolution, ironless 3-phase linear motor, 48 V

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A-110.200A1

PIglide LC Linear stage, air bearing, 200 mm travel range, incremental linear encoder with sin/cos signal transmission, 20 µm sensor signal period, ironless 3-phase linear motor, 48 V

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A-110.200B1

PIglide LC Linear stage, air bearing, 200 mm travel range, absolute linear encoder with BiSS-C signal transmission, 1 nm sensor resolution, ironless 3-phase linear motor, 48 V

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A-110.300A1

PIglide LC Linear stage, air bearing, 300 mm travel range, incremental linear encoder with sin/cos signal transmission, 20 µm sensor signal period, ironless 3-phase linear motor, 48 V

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A-110.300B1

PIglide LC Linear stage, air bearing, 300 mm travel range, absolute linear encoder with BiSS-C signal transmission, 1 nm sensor resolution, ironless 3-phase linear motor, 48 V

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A-110.400A1

PIglide LC Linear stage, air bearing, 400 mm travel range, incremental linear encoder with sin/cos signal transmission, 20 µm sensor signal period, ironless 3-phase linear motor, 48 V

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A-110.400B1

PIglide LC Linear stage, air bearing, 400 mm travel range, absolute linear encoder with BiSS-C signal transmission, 1 nm sensor resolution, ironless 3-phase linear motor, 48 V

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