A-141 PIglide MB Miniature Linear Stage with Air Bearings

High Performance, Cleanroom Compatible, Customizable

Size of the motion platform 57 mm × 93 mm
Low profile 38 mm
Travel ranges to 35 mm
Load capacity to 3 kg
Velocity to 0.25 m/sec
Acceleration to 3.5 m/s²

The PIglide MB linear stage with air bearing is equipped with a servo linear motor drive with preloaded air bearings and integrated optical linear encoder. This stage offers ultra-precision in miniature format. The combination of the noncontact components results in a frictionless motion platform that offers the highest performance, quality, and lifetime.

PIglide Filter and Air Preparation Kits
Single and multi-axis motion controller
Base plates made of granite and systems for reducing vibration

The stage is ideally suited for many high precision applications, such as metrology, photonics alignment, optics positioning, and scanning. The noncontact design also is ideal for cleanroom applications. Electrical cables are not moved. The air bearing module offers a locking design for the ultimate in position stability.

Download datasheet specifications

Datasheet

Version / Date

2020-03-31

pdf - 628 KB

Version / Date

2020-03-31

pdf - 632 KB

Version / Date

2021-01-15

pdf - 420 KB

Download

Motion	A-141	Unit	Tolerance
Active axes	X
Travel range	35	mm
Pitch / yaw / roll ⁽¹⁾ over the entire travel range	10	µrad	Max.
Straightness / flatness ⁽¹⁾ over the entire travel range	0.2	µm	Max.
Velocity ⁽²⁾, unloaded	0.25	m/s	Max.
Acceleration ⁽²⁾, unloaded	3.5	m/s²	Max.

Mechanical properties	A-141	Unit	Tolerance
Load capacity in z ⁽³⁾	30	N	Max.
Permissible torque in θx ⁽³⁾	1.1	Nm	Max.
Permissible torque in θy ⁽³⁾	2.8	Nm	Max.
Moved mass	0.3	kg
Overall mass	0.6	kg
Guide type	Air bearing

Drive properties	A-141	Unit	Tolerance
Drive type	Linear motor, ironless, 3-phase
Intermediate circuit voltage, RMS	48, nominal 80, max.	V DC
Peak current, RMS	1.1	A	Max.
Nominal current, RMS	0.3	A	Max.
Peak force	2.3	N	Typ.
Nominal force	0.58	N	Typ.
Force constant, RMS	2.1	N/A	Typ.
Resistance phase-phase	22.4	Ω	Typ.
Inductance phase-phase	1.0	mH	Typ.
Back EMF phase-phase	0.7	V·s/m	Max.
Cabling	Internal, no moving cable

Positioning	A-141
Integrated sensor	Incremental linear encoder with travel range limits and home index
Sensor signal	Sin/cos, 1 V peak-peak, 20 µm signal period
Sensor resolution	4.88 nm ⁽⁴⁾
Bidirectional repeatability	±0.1 µm
Accuracy, uncompensated ⁽⁵⁾	±2.0 µm
Accuracy, with error compensation ⁽⁵⁾	±0.2 µm

Miscellaneous	A-141
Operating pressure ⁽⁶⁾	70±5 psi (480±35 kPa)
Air consumption	<1.0 SCFM (28 SLPM)
Air quality	Clean (filtered to 1.0 μm or better) - ISO 8573‑1 Class 1 Oil free - ISO 8573‑1 Class 1 Dry (-15 °C dew point) - ISO 8573‑1 Class 3
Materials	Hardcoat aluminum, stainless steel mounting hardware

⁽¹⁾ Dependent on the flatness of the surface, on which the stage is mounted.

⁽²⁾ Can be limited by the payload, controller or drive.

⁽³⁾ Assumes an air bearing operating pressure of 70 psi (480 kPa). The stage is designed for horizontal operation only.

⁽⁴⁾ Assumes 4096x interpolation. Contact PI for the use of other factors.

⁽⁵⁾ Improved accuracy can be obtained with controller-based error compensation. The stage must be ordered with a controller from PI to reach these values. Accuracy values assume short duration and do not consider the long-term effects of thermal drift on the stage.

⁽⁶⁾ To protect the stage against damage, it is recommended to connect an air pressure sensor to the E-Stop input of the controller.

Download datasheet downloads

Datasheet

Version / Date

2020-03-31

pdf - 628 KB

Version / Date

2020-03-31

pdf - 632 KB

Version / Date

2021-01-15

pdf - 420 KB

Download

Documentation

A-141 Series Miniature Linear Air Bearing Stage

Version / Date

2020-03-26

pdf - 1 MB

English

3-D Models

zip - 1 MB

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A-141.035A1

PIglide MB miniature air bearing module, 35 mm travel range, linear encoder with sin/cos signal transmission, 20 µm signal period, 3-phase linear motor, 48 V

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